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1. (WO2017033076) SUBSTRATE SUPPORT

Pub. No.:    WO/2017/033076    International Application No.:    PCT/IB2016/054630
Publication Date: Fri Mar 03 00:59:59 CET 2017 International Filing Date: Wed Aug 03 01:59:59 CEST 2016
IPC: H01L 21/687
Applicants: MEYER BURGER (GERMANY) GMBH
Inventors: RASCHKE, Sebastian
ANSORGE, Erik
KEHR, Mirko
BÖHM, Christian
Title: SUBSTRATE SUPPORT
Abstract:
The present invention relates to a substrate support with a substrate support plate which has a front substrate support surface on which at least one substrate-receiving area is provided for receiving a respective substrate. The object of the present invention is to propose a substrate support which, as far as possible without impairing the properties of the substrate or the working of the substrate, ensures a secure application of the substrate and, while permitting rapid handling, allows the substrate to be easily removed from the substrate support without being destroyed. According to the invention, the object is achieved by the fact that the substrate-receiving area has an inner area and an outer area extending around the inner area, wherein the outer area has plateaus which are spaced apart from each other and elevated above a surface of the inner area and serve to carry edge areas of the substrate, wherein ventilation channels are provided between the plateaus.