Search International and National Patent Collections

1. (WO2017032896) ARRANGEMENT OF A DEVICE FOR PROTECTING A RETICLE, ARRANGED IN AN OBJECT PLANE, FROM SOILING

Pub. No.:    WO/2017/032896    International Application No.:    PCT/EP2016/070248
Publication Date: Fri Mar 03 00:59:59 CET 2017 International Filing Date: Sat Aug 27 01:59:59 CEST 2016
IPC: G03F 1/62
G03F 7/20
G02B 5/28
Applicants: CARL ZEISS SMT GMBH
Inventors: HENNERKES, Christoph
Title: ARRANGEMENT OF A DEVICE FOR PROTECTING A RETICLE, ARRANGED IN AN OBJECT PLANE, FROM SOILING
Abstract:
The invention relates to a protection device (28) for protecting a reticle (7). Said protection device is arranged so it can tilt with respect to an object plane (6).