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1. (WO2017032868) MOISTURE-REPELLENT PROTECTIVE LAYER

Pub. No.:    WO/2017/032868    International Application No.:    PCT/EP2016/070163
Publication Date: Fri Mar 03 00:59:59 CET 2017 International Filing Date: Sat Aug 27 01:59:59 CEST 2016
IPC: H01L 41/053
H01L 41/23
Applicants: CERAMTEC GMBH
Inventors: SCHREINER, Hans-Jürgen
EINHELLINGER-MÜLLER, Tanja
SCHMIDT, Tobias
MOOS, Ralf
SCHUBERT, Michael
BINDIG, Reiner
Title: MOISTURE-REPELLENT PROTECTIVE LAYER
Abstract:
The invention relates to a piezoceramic multi-layered actuator having a moisture-repellent protective layer, and to a method for producing same.