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1. (WO2017032818) ABLATIVE PRODUCTION DEVICE AND METHOD FOR A PERIODIC LINE STRUCTURE ON A WORKPIECE
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Pub. No.: WO/2017/032818 International Application No.: PCT/EP2016/070029
Publication Date: 02.03.2017 International Filing Date: 25.08.2016
IPC:
B23K 26/00 (2014.01) ,B23K 26/067 (2006.01) ,B23K 26/073 (2006.01) ,B23K 26/0622 (2014.01) ,B23K 26/066 (2014.01)
B PERFORMING OPERATIONS; TRANSPORTING
23
MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
K
SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
26
Working by laser beam, e.g. welding, cutting, boring
B PERFORMING OPERATIONS; TRANSPORTING
23
MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
K
SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
26
Working by laser beam, e.g. welding, cutting, boring
02
Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
06
Shaping the laser beam, e.g. by masks or multi-focusing
067
Dividing the beam into multiple beams, e.g. multi-focusing
B PERFORMING OPERATIONS; TRANSPORTING
23
MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
K
SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
26
Working by laser beam, e.g. welding, cutting, boring
02
Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
06
Shaping the laser beam, e.g. by masks or multi-focusing
073
Shaping the laser spot
[IPC code unknown for B23K 26/0622][IPC code unknown for B23K 26/066]
Applicants:
LASER-LABORATORIUM GOETTINGEN E.V. [DE/DE]; Hans-Adolf-Krebs-Weg 1 37077 Goettingen, DE
Inventors:
IHLEMANN, Juergen; DE
MEINERTZ, Joerg; DE
STARK, Lars Henning; DE
Agent:
WICHMANN, Hendrik; DE
Priority Data:
102015216342.326.08.2015DE
Title (EN) ABLATIVE PRODUCTION DEVICE AND METHOD FOR A PERIODIC LINE STRUCTURE ON A WORKPIECE
(FR) DISPOSITIF ET PROCÉDÉ PERMETTANT LA FABRICATION PAR ABLATION D’UNE STRUCTURE LINÉAIRE PÉRIODIQUE SUR UNE PIÈCE
(DE) VORRICHTUNG UND VERFAHREN ZUR ABLATIVEN HERSTELLUNG EINER PERIODISCHEN LINIENSTRUKTUR AN EINEM WERKSTÜCK
Abstract:
(EN) The invention relates to an ablative production device and method for a periodic line structure on a workpiece (108). The device comprises a pulsed laser (109) for generating ablative light (110), a phase mask (102) arranged in the beam path of the ablative light (110), imaging optics (104) arranged on an optical axis (101), and a holder (106) to hold the workpiece (108) in an image plane (107). The phase mask (102) produces a plurality of equidistant parallel lines (112) in an object plane (103) by interference and suppresses an order of diffraction parallel to the optical axis (101). The optical axis (101) is perpendicular to the object plane (103). The imaging optics (104) comprises a cylindrical lens which is aligned in parallel to the lines (112) and is designed to image the object plane (103) into the image plane (107).
(FR) L’invention concerne un dispositif et un procédé permettant la fabrication par ablation d’une structure linéaire périodique sur une pièce (108). Le dispositif comprend un laser pulsé (109) destiné à produire une lumière ablative (110), un masque de phase (102) placé sur le trajet optique de la lumière ablative (110), une optique de reproduction (104), placée sur un axe optique (101), et un support (106) permettant de disposer la pièce (108) dans un plan image (107). Le masque de phase (102) génère par interférence une pluralité de lignes parallèles équidistantes (112) dans un plan objet (103) et atténue un ordre de diffraction parallèle à l'axe optique (101). L’axe optique (101) est perpendiculaire au plan objet (103). L’optique de reproduction (104) comprend une lentille cylindrique, orientée parallèlement aux lignes (112), et est conçue pour reproduire le plan objet (103) dans le plan image (107).
(DE) Eine Vorrichtung und ein Verfahren zur ablativen Herstellung einer periodischen Linienstruktur an einem Werkstück (108) werden beschrieben. Die Vorrichtung umfasst einen gepulsten Laser (109) zur Erzeugung ablativen Lichts (110), eine im Strahlengang des ablativen Lichts (110) angeordnete Phasenmaske (102), eine auf einer optischen Achse (101) angeordnete Abbildungsoptik (104) und eine Halterung (106), um das Werkstück (108) in einer Bildebene (107) anzuordnen. Die Phasenmaske (102) erzeugt durch Interferenz eine Vielzahl äquidistanter paralleler Linien (112) in einer Gegenstandsebene (103) und unterdrückt eine zur optischen Achse (101) parallele Beugungsordnung. Die optische Achse (101) ist senkrecht zur Gegenstandsebene (103). Die Abbildungsoptik (104) umfasst eine parallel der Linien (112) ausgerichtete Zylinderlinse und ist dazu ausgebildet, die Gegenstandsebene (103) in die Bildebene (107) abzubilden.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: German (DE)
Filing Language: German (DE)