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1. (WO2017032806) DEVICE FOR APPLYING TO A SUBSTRATE A LIQUID MEDIUM THAT HAS BEEN CHARGED WITH UV RADIATION

Pub. No.:    WO/2017/032806    International Application No.:    PCT/EP2016/069989
Publication Date: Fri Mar 03 00:59:59 CET 2017 International Filing Date: Thu Aug 25 01:59:59 CEST 2016
IPC: H01L 21/67
B08B 3/10
B08B 7/00
C23C 16/455
Applicants: SÜSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO.KG
Inventors: DRESS, Peter
DIETZE, Uwe
GRABITZ, Peter
Title: DEVICE FOR APPLYING TO A SUBSTRATE A LIQUID MEDIUM THAT HAS BEEN CHARGED WITH UV RADIATION
Abstract:
A device for applying to a substrate a liquid medium that has been charged with UV radiation is disclosed, which device has the following: a housing having an elongate chamber, having at least one inlet opening which opens toward the chamber and having a slot-shaped outlet opening which is situated opposite the at least one inlet opening and which extends over the length of the chamber; a pipe element which extends through the chamber in the longitudinal direction and which is at least partially transparent for UV radiation, wherein the pipe element is arranged in the chamber such that, between the pipe element and the wall of the chamber, there is formed a flow space which is symmetrical with respect to a longitudinal central plane of the chamber which centrally intersects the outlet opening, and such that the pipe element extends into the slot-shaped outlet opening in the housing and, in so doing, forms two outlet slots, extending in the longitudinal direction, between pipe element and housing; and at least one UV radiation source in the pipe element, which at least one UV radiation source is arranged so as to emit UV radiation in the direction of the flow space and out of the housing through the outlet opening. The device is characterized by means which are suitable for influencing the radiation emitted by the at least one UV radiation source and emerging from the outlet opening, in such a way that a substantially homogeneous spatial distribution of the radicals on the surface of the substrate is realized in a region below at least 50% of the outlet opening. In the case of this known construction, a high radical concentration is realized in a region below the center of the outlet opening, which radical concentration decreases sharply transversely with respect to the outlet opening.