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1. (WO2017032395) APPARATUS FOR TRANSPORTATION OF A SUBSTRATE, APPARATUS FOR VACUUM PROCESSING OF A SUBSTRATE, AND METHOD FOR MAINTENANCE OF A MAGNETIC LEVITATION SYSTEM
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2017/032395 International Application No.: PCT/EP2015/069264
Publication Date: 02.03.2017 International Filing Date: 21.08.2015
IPC:
H01L 21/677 (2006.01) ,H01L 21/687 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677
for conveying, e.g. between different work stations
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
683
for supporting or gripping
687
using mechanical means, e.g. chucks, clamps or pinches
Applicants:
KLEIN, Wolfgang [DE/DE]; DE (US)
HEIMEL, Oliver [DE/DE]; DE (US)
LAU, Simon [DE/DE]; DE (US)
APPLIED MATERIALS, INC. [US/US]; 3050 Bowers Avenue Santa Clara, California 95054, US
Inventors:
KLEIN, Wolfgang; DE
HEIMEL, Oliver; DE
LAU, Simon; DE
Agent:
ZIMMERMANN & PARTNER PATENTANWÄLTE MBB; Josephspitalstr. 15 80331 München, DE
Priority Data:
Title (EN) APPARATUS FOR TRANSPORTATION OF A SUBSTRATE, APPARATUS FOR VACUUM PROCESSING OF A SUBSTRATE, AND METHOD FOR MAINTENANCE OF A MAGNETIC LEVITATION SYSTEM
(FR) APPAREIL POUR LE TRANSPORT D'UN SUBSTRAT, APPAREIL DE TRAITEMENT SOUS VIDE D'UN SUBSTRAT ET PROCÉDÉ POUR L'ENTRETIEN D'UN SYSTÈME DE LÉVITATION MAGNÉTIQUE
Abstract:
(EN) An apparatus (100) for transportation of a substrate (10) is provided. The apparatus (100) includes a vacuum chamber (110) having a chamber wall configured to separate a vacuum side (101) from an atmospheric side (102) and a magnetic levitation system (120) configured for a contactless levitation of a substrate carrier (140) in the vacuum chamber (110). The magnetic levitation system (120) includes at least one magnetic device (122) configured for providing a magnetic force (F) acting on the substrate carrier (140) during transportation of the substrate carrier (140) in the vacuum chamber (110) along a transportation path and at least one holding unit (130) configured to hold the at least one magnetic device (122) being accessible from the atmospheric side (102).
(FR) L'invention concerne un appareil (100) pour le transport d'un substrat (10). L'appareil (100) comprend une chambre sous vide (110) ayant une paroi de chambre conçue pour séparer un côté sous vide (101) d'un côté atmosphérique (102) et un système de lévitation magnétique (120) conçu pour une lévitation sans contact d'un support (140) de substrat dans la chambre sous vide (110). Le système de lévitation magnétique (120) comprend au moins un dispositif magnétique (122) conçu pour fournir une force magnétique (F) agissant sur le support (140) de substrat pendant le transport du support (140) de substrat dans la chambre sous vide (110) le long d'un trajet de transport et au moins une unité de retenue (130) conçue pour maintenir le au moins un dispositif magnétique (122) qui est accessible depuis le côté atmosphérique (102).
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)