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1. (WO2017032248) SMALL-OPENING MASK PLATE FOR EVAPORATION

Pub. No.:    WO/2017/032248    International Application No.:    PCT/CN2016/095612
Publication Date: Fri Mar 03 00:59:59 CET 2017 International Filing Date: Thu Aug 18 01:59:59 CEST 2016
IPC: C23C 14/04
Applicants: KUN SHAN POWER STENCIL CO., LTD.
昆山允升吉光电科技有限公司
Inventors: WEI, Zhiling
魏志凌
ZHAO, Lujun
赵录军
YANG, Tao
杨涛
Title: SMALL-OPENING MASK PLATE FOR EVAPORATION
Abstract:
A small-opening mask plate (30) for evaporation comprises two layers of structures comprising a mask layer (42) and a mask supporting layer (41). The mask layer (42) has an opening unit formed by a mask opening (420) array, and the mask supporting layer (41) has a window unit formed by a supporting window (410) array. The mask layer (42) is tightly attached to the mask supporting layer (41). The manner of the mask opening (420) array forming the opening unit is the same as the manner of the supporting window (410) array forming the window unit. The mask openings (420) are in a one-to-one correspondence with the supporting windows (410), and each mask opening (420) is arranged in a corresponding supporting window (410). The opening size of each mask opening (420) is smaller than the opening size of the corresponding supporting window (410), and the thickness of the mask layer (42) is not greater than the thickness of the mask supporting layer (41).