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1. (WO2017031822) APPLICATION OF NOVEL TEMPERATURE CONTROL SYSTEM IN PREPARATION OF LOW-TEMPERATURE THIN FILM

Pub. No.:    WO/2017/031822    International Application No.:    PCT/CN2015/092388
Publication Date: Fri Mar 03 00:59:59 CET 2017 International Filing Date: Thu Oct 22 01:59:59 CEST 2015
IPC: C23C 14/46
Applicants: SHENYANG PIOTECH CO., LTD.
沈阳拓荆科技有限公司
Inventors: WU, Wei
吴围
YU, Peng
于棚
ZHENG, Yingjie
郑英杰
LI, Dan
李丹
Title: APPLICATION OF NOVEL TEMPERATURE CONTROL SYSTEM IN PREPARATION OF LOW-TEMPERATURE THIN FILM
Abstract:
An application of a novel temperature control system in the preparation of a low-temperature thin film. The temperature control system is achieved by carrying out temperature control on a heating plate by means of medium oil. The heating mode in which a temperature is controlled by means of oil enables the heating plate in a technological process to be kept in a set temperature range.