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1. (WO2017031785) REPAIR APPARATUS FOR TRANSPARENT CONDUCTIVE ELECTRODE

Pub. No.:    WO/2017/031785    International Application No.:    PCT/CN2015/089095
Publication Date: Fri Mar 03 00:59:59 CET 2017 International Filing Date: Wed Sep 09 01:59:59 CEST 2015
IPC: G02F 1/1343
G02F 1/13
B23K 26/10
Applicants: WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
武汉华星光电技术有限公司
Inventors: FAN, Guangbao
范广宝
Title: REPAIR APPARATUS FOR TRANSPARENT CONDUCTIVE ELECTRODE
Abstract:
Provided is a repair apparatus for a transparent conductive electrode, comprising: an electrode sputtering mechanism; and a baffle plate mechanism (200) disposed between the electrode sputtering mechanism and a substrate (104) on which a to-be-repaired electrode is disposed. A channel (A) with an adjustable cross section area and an adjustable position is formed to adjust a coverage area and coverage position of electrical particles, output by the electrode sputtering mechanism, on the substrate (104). Therefore, a defective transparent conductive electrode can be repaired precisely, thereby significantly improving the yield of liquid crystal display panels.