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1. (WO2017031580) ANTI-STRESS COATING FOR PROCESS CHAMBER SHIELDING SYSTEM

Pub. No.:    WO/2017/031580    International Application No.:    PCT/CA2016/050987
Publication Date: Fri Mar 03 00:59:59 CET 2017 International Filing Date: Tue Aug 23 01:59:59 CEST 2016
IPC: B08B 17/04
C23C 14/22
C23C 16/44
C23F 15/00
Applicants: NOVENA TEC INC.
Inventors: MONTES, Rommel
THIRU, Rajan
THIRUN, Ravi
Title: ANTI-STRESS COATING FOR PROCESS CHAMBER SHIELDING SYSTEM
Abstract:
A coating for protecting a base material, such as a process chamber component, from an excess material film resulting from operation of a process chamber. The coating including a sheet for receiving the excess material deposited during the operation. In some aspects the sheet may be structured to provide at least one of stress relief and defect prevention in the deposited excess material. The sheet structure may include at least one of folds, ribs, and bi-facial curves in the sheet. In an aspect, the sheet may be patterned to provide improved adhesion of the deposited excess material. A plurality of joints for securing the at least one sheet at joint locations to the base material. In some aspects, a method and system are provided for protecting process chamber components.