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1. (WO2017021045) PRODUCTION METHOD FOR PRODUCING AN ELECTROMECHANICAL ACTUATOR AND ELECTROMECHANICAL ACTUATOR

Pub. No.:    WO/2017/021045    International Application No.:    PCT/EP2016/063841
Publication Date: Fri Feb 10 00:59:59 CET 2017 International Filing Date: Fri Jun 17 01:59:59 CEST 2016
IPC: H01L 41/047
H01L 41/293
Applicants: CONTINENTAL AUTOMOTIVE GMBH
Inventors: HAUBOLD, Jörg
HEINZE, Thomas
KREISSIG, Udo
LENK, Andreas
MEINER, Andreas
Title: PRODUCTION METHOD FOR PRODUCING AN ELECTROMECHANICAL ACTUATOR AND ELECTROMECHANICAL ACTUATOR
Abstract:
The invention relates to a production method for producing an electromechanical actuator (10), in which an electrical component (12) is provided, formed as a stack (14) of material layers (16) and electrode layers (18), and on the peripheral region (20) of which an insulation layer (30) is applied, wherein one electrode layer (18) in the component (12) is exposed by removing an insulation layer region (44), wherein a first removal rate (RI) for the insulation layer material (52) is selected to be significantly greater than a second removal rate (RW) for the material of the material layer (54), and wherein the second removal rate (RW) for the material of the material layer (54) is selected to be significantly greater than a third removal rate (RE) for the electrode layer material (56). The invention also relates to an electromechanical actuator (10) produced in particular using a production method of this type.