Search International and National Patent Collections

1. (WO2017020272) A SHADOW MASK FOR ORGANIC LIGHT EMITTING DIODE MANUFACTURE

Pub. No.:    WO/2017/020272    International Application No.:    PCT/CN2015/086106
Publication Date: Fri Feb 10 00:59:59 CET 2017 International Filing Date: Thu Aug 06 01:59:59 CEST 2015
IPC: C23C 14/04
C25D 1/10
Applicants: APPLIED MATERIALS, INC.
HUANG, XI
Inventors: HUANG, XI
LASSITER, Brian E.
HAAS, Dieter
Title: A SHADOW MASK FOR ORGANIC LIGHT EMITTING DIODE MANUFACTURE
Abstract:
A shadow mask (200) includes a frame (210) made of a metallic material, and one or more mask patterns (205) coupled to the frame (210), the one or more mask patterns (205) comprising a metallic material having a coefficient of thermal expansion less than or equal to about 14 microns/meter/degrees Celsius and having a plurality of openings (215) formed therein, the metallic material having a thickness of about 5 microns to about 50 microns and having a pitch tolerance between openings (215) of about +/-3 microns across a length of about 160 millimeters.