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1. (WO2017019790) EPITAXIAL BARIUM TITANATE THIN FILMS USING A HIGHLY VOLATILE BA(HFA)2 TRIGLYME PRECURSOR

Pub. No.:    WO/2017/019790    International Application No.:    PCT/US2016/044299
Publication Date: Fri Feb 03 00:59:59 CET 2017 International Filing Date: Thu Jul 28 01:59:59 CEST 2016
IPC: C23C 16/18
C23C 16/40
C30B 25/02
C23C 16/448
Applicants: NORTHWESTERN UNIVERSITY
Inventors: WESSELS, Bruce, W.
JEONG, Young, Kyu
Title: EPITAXIAL BARIUM TITANATE THIN FILMS USING A HIGHLY VOLATILE BA(HFA)2 TRIGLYME PRECURSOR
Abstract:
Ferroelectric barium titanate (BaTiO3) epitaxial films grown by metal-organic chemical vapor deposition using a barium precursor having a low melting point and a stable vapor pressure.