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|1. (WO2017018771) METHOD FOR PREPARING TETRASILANE AND PENTASILANE|
|Applicants:||SK-MATERIALS CO., LTD
|Inventors:||SONG, Young Ha
KWON, Sam Bong
KIM, Sung Soo
|Title:||METHOD FOR PREPARING TETRASILANE AND PENTASILANE|
The present invention relates to a method, for preparing high order silane, which enables economical and efficient preparation of high value-added, high order silane, particularly tetrasilane or pentasilane, in a high yield compared to an existing process. More specifically, the present invention relates to a method for preparing high order silane by using trisilane as the material for silane for thermal decomposition.