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1. (WO2017018771) METHOD FOR PREPARING TETRASILANE AND PENTASILANE

Pub. No.:    WO/2017/018771    International Application No.:    PCT/KR2016/008140
Publication Date: Fri Feb 03 00:59:59 CET 2017 International Filing Date: Wed Jul 27 01:59:59 CEST 2016
IPC: C01B 33/04
C07F 7/02
C07F 7/08
Applicants: SK-MATERIALS CO., LTD
에스케이머티리얼즈 주식회사
Inventors: SONG, Young Ha
송영하
KWON, Sam Bong
권삼봉
KIM, Sung Soo
김성수
Title: METHOD FOR PREPARING TETRASILANE AND PENTASILANE
Abstract:
The present invention relates to a method, for preparing high order silane, which enables economical and efficient preparation of high value-added, high order silane, particularly tetrasilane or pentasilane, in a high yield compared to an existing process. More specifically, the present invention relates to a method for preparing high order silane by using trisilane as the material for silane for thermal decomposition.