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1. (WO2017018304) DISCHARGE DEVICE AND DISCHARGE METHOD FOR LIQUID MATERIAL CONTAINING SOLID PARTICLES, AND COATING DEVICE

Pub. No.:    WO/2017/018304    International Application No.:    PCT/JP2016/071342
Publication Date: Fri Feb 03 00:59:59 CET 2017 International Filing Date: Fri Jul 22 01:59:59 CEST 2016
IPC: B05C 5/00
B05C 11/10
B05D 1/26
B05D 7/24
H01L 33/50
Applicants: MUSASHI ENGINEERING, INC.
武蔵エンジニアリング株式会社
Inventors: IKUSHIMA, Kazumasa
生島 和正
Title: DISCHARGE DEVICE AND DISCHARGE METHOD FOR LIQUID MATERIAL CONTAINING SOLID PARTICLES, AND COATING DEVICE
Abstract:
[Problem] To provide a device and a method that are for discharging a liquid that has solid particles dispersed therein, wherein additional structures for dispersing the solid particles are kept to a minimum. [Solution] A discharge device and a coating device. The discharge device is provided with: a storage container for a solid-particle-containing liquid material; a measurement part that has a measurement hole; a plunger that is inside the measurement hole; a nozzle; a switching valve that has a first position, at which the storage container and the measurement part are made to communicate, and a second position, at which the measurement part and the nozzle are made to communicate; a plunger drive device; a switching valve drive device; and a discharge control device. The discharge device has a discharge control program that includes: a filling step wherein the switching valve is put into the first position and the inside of the measurement hole is filled with the liquid material; an excretion step wherein the switching valve is put into the second position and the liquid material inside the measurement hole is discharged from a discharge port; an inflow step wherein the switching valve is put into the first position and the liquid material inside the measurement hole flows into the storage container; a discharge step wherein the filling step and the excretion step are executed in succession; and a mixing step wherein the filling step and the inflow step are executed continuously in succession.