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1. WO2017016055 - SUPPORTING STRUCTURE AND VACUUM DEVICE

Publication Number WO/2017/016055
Publication Date 02.02.2017
International Application No. PCT/CN2015/089993
International Filing Date 18.09.2015
IPC
H01L 21/687 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
683for supporting or gripping
687using mechanical means, e.g. chucks, clamps or pinches
CPC
H01L 21/687
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
683for supporting or gripping
687using mechanical means, e.g. chucks, clamps or pinches
H01L 21/6875
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
683for supporting or gripping
687using mechanical means, e.g. chucks, clamps or pinches
68714the wafers being placed on a susceptor, stage or support
6875characterised by a plurality of individual support members, e.g. support posts or protrusions
Applicants
  • 深圳市华星光电技术有限公司 SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD. [CN]/[CN]
  • 武汉华星光电技术有限公司 WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD [CN]/[CN]
Inventors
  • 杨元隆 YANG, Yuanlung
Agents
  • 广州三环专利商标代理有限公司 SCIHEAD IP LAW FIRM
Priority Data
201510456352.229.07.2015CN
Publication Language Chinese (ZH)
Filing Language Chinese (ZH)
Designated States
Title
(EN) SUPPORTING STRUCTURE AND VACUUM DEVICE
(FR) STRUCTURE DE SUPPORT ET DISPOSITIF SOUS VIDE
(ZH) 一种支撑结构及真空设备
Abstract
(EN)
A supporting structure and a vacuum device. The supporting structure comprises a machine (1). The machine (1) is provided with outer supporting legs (3) and inner supporting legs (4). The outer supporting legs (3) are disposed at the edge of the machine (1). The inner supporting legs (4) are movably disposed in a middle area of the machine (1). There are three inner supporting legs (4) arranged at intervals and located in a cutting area corresponding to a glass substrate (2). Top ends of the inner supporting legs (4) and the outer supporting legs (3) are provided with a metal head separately. Since there are only three inner supporting legs (4), the cost is reduced, the probability of electrostatic induction can be reduced to a certain extent, and the reliability of a product is improved.
(FR)
L'invention concerne une structure de support et un dispositif sous vide. La structure de support comprend une machine (1). La machine (1) est dotée de pieds de support extérieurs (3) et de pieds de support intérieurs (4). Les pieds de support (3) extérieurs sont disposés au niveau du bord de la machine (1). Les pieds de support intérieurs (4) sont disposés mobiles dans une zone centrale de la machine (1). Les pieds de support intérieurs (4) au nombre de trois sont agencés à intervalles et situés dans une zone de coupe correspondant à un substrat de verre (2). Des extrémités supérieures des pieds de support intérieurs (4) et des pieds de support extérieurs (3) sont pourvues d'une tête métallique, séparément. Étant donné qu'il y a seulement trois pieds de support intérieurs (4), le coût est réduit, la probabilité d'induction électrostatique peut être réduite dans une certaine mesure, et la fiabilité du produit est améliorée.
(ZH)
一种支撑结构及真空设备,支撑结构包括机台(1),机台(1)上设置有外支撑脚(3)及内支撑脚(4),外支撑脚(3)设置在所述机台(1)的边缘,内支撑脚(4)可活动地设置在机台(1)的中部区域,内支撑脚(4)为三个,间隔排列设置,位于对应玻璃基板(2)的切割区域,内支撑脚(4)与外支撑脚(3)的顶端均设置有金属头;由于将内支撑脚(4)仅设置3个,降低成本,也可一定程度上减少产生静电感应的几率,提高产品可靠性。
Also published as
Latest bibliographic data on file with the International Bureau