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1. (WO2016203106) MEMS CAPACITIVE PRESSURE SENSOR AND MANUFACTURING METHOD
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2016/203106 International Application No.: PCT/FI2016/050424
Publication Date: 22.12.2016 International Filing Date: 14.06.2016
IPC:
G01L 9/00 (2006.01) ,G01L 19/06 (2006.01) ,B81B 3/00 (2006.01) ,B81C 1/00 (2006.01)
G PHYSICS
01
MEASURING; TESTING
L
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9
Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
G PHYSICS
01
MEASURING; TESTING
L
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
19
Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
06
Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
B PERFORMING OPERATIONS; TRANSPORTING
81
MICRO-STRUCTURAL TECHNOLOGY
B
MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES
3
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
B PERFORMING OPERATIONS; TRANSPORTING
81
MICRO-STRUCTURAL TECHNOLOGY
C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
1
Manufacture or treatment of devices or systems in or on a substrate
Applicants:
TEKNOLOGIAN TUTKIMUSKESKUS VTT OY [FI/FI]; Vuorimiehentie 3 02150 Espoo, FI
Inventors:
ERMOLOV, Vladimir; FI
SAARILAHTI, Jaakko; FI
Agent:
KOLSTER OY AB; (Salmisaarenaukio 1) P.O.Box 204, FI
Priority Data:
2015546115.06.2015FI
Title (EN) MEMS CAPACITIVE PRESSURE SENSOR AND MANUFACTURING METHOD
(FR) CAPTEUR CAPACITIF DE PRESSION MEMS ET SON PROCÉDÉ DE FABRICATION
Abstract:
(EN) According to an example aspect of the present invention, there is provided a MEMS capacitive pressure sensor (1), comprising a first electrode (17), a deformable second electrode (18) being electrically insulated from the first electrode (17) by means of a chamber (4) between the first electrode (17) and the second electrode (18), and wherein at least one of the first electrode (17) and the second electrode (18) includes at least one pedestal (5) protruding into the chamber (4). According to another example aspect of the present invention, there is also provided a method for manufacturing a MEMS capacitive pressure sensor (1).
(FR) Un aspect donné à titre d'exemple de la présente invention concerne un capteur capacitif de pression MEMS (1), comprenant une première électrode (17), une deuxième électrode (18) déformable étant isolée électriquement de la première électrode (17) au moyen d'une chambre (4) entre la première électrode (17) et la deuxième électrode (18), et la première électrode (17) et/ou la deuxième électrode (18) comprenant au moins un support (5) faisant saillie à l'intérieur de la chambre (4). Un autre aspect donné à titre d'exemple de la présente invention concerne également un procédé de fabrication d'un capteur capacitif de pression MEMS (1).
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
EP3308122US20180188127JP2018521317CN107850505