Processing

Please wait...

Settings

Settings

Goto Application

1. WO2016184594 - MICROMECHANICAL SPRING DEVICE, AND METHOD FOR PRODUCING A MICROMECHANICAL SPRING DEVICE

Publication Number WO/2016/184594
Publication Date 24.11.2016
International Application No. PCT/EP2016/057222
International Filing Date 01.04.2016
IPC
F16F 1/02 2006.01
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16ENGINEERING ELEMENTS OR UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
1Springs
02made of steel or other material having low internal friction; Wound, torsion, leaf, cup, ring or the like springs, the material of the spring not being relevant
B81B 3/00 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
3Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
CPC
B81B 2201/0242
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
2201Specific applications of microelectromechanical systems
02Sensors
0228Inertial sensors
0242Gyroscopes
B81B 2201/042
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
2201Specific applications of microelectromechanical systems
04Optical MEMS
042Micromirrors, not used as optical switches
B81B 2203/0163
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
2203Basic microelectromechanical structures
01Suspended structures, i.e. structures allowing a movement
0145Flexible holders
0163Spring holders
B81B 2203/058
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
2203Basic microelectromechanical structures
05Type of movement
058Rotation out of a plane parallel to the substrate
B81B 3/0045
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
3Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
0035Constitution or structural means for controlling the movement of the flexible or deformable elements
004Angular deflection
0045Improve properties related to angular swinging, e.g. control resonance frequency
B81C 99/006
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
99Subject matter not provided for in other groups of this subclass
0055Manufacturing logistics
006Design; Simulation
Applicants
  • ROBERT BOSCH GMBH [DE]/[DE]
Inventors
  • SPECHT, Hendrik
  • PUTIGNANO, Massimiliano
  • GRUTZECK, Helmut
  • PRUETZ, Odd-Axel
  • NJIKAM NJIMONZIE, Frederic
  • MUCHOW, Joerg
Priority Data
10 2015 209 030.218.05.2015DE
Publication Language German (DE)
Filing Language German (DE)
Designated States
Title
(DE) MIKROMECHANISCHE FEDERVORRICHTUNG UND VERFAHREN ZUM HERSTELLEN EINER MIKROMECHANISCHEN FEDERVORRICHTUNG
(EN) MICROMECHANICAL SPRING DEVICE, AND METHOD FOR PRODUCING A MICROMECHANICAL SPRING DEVICE
(FR) DISPOSITIF RESSORT MICROMÉCANIQUE ET PROCÉDÉ DE FABRICATION D'UN DISPOSITIF RESSORT MICROMÉCANIQUE
Abstract
(DE)
Die Erfindung schafft eine mikromechanische Vorrichtung sowie ein entsprechendes Herstellungsverfahren. Die Vorrichtung ist ausgebildet mit: Mikromechanische Vorrichtung (10) mit: einer Federeinrichtung (16; 216; 316; 416; 516), welche an mindestens einem Anbindungspunkt (24-i; 124) der Federeinrichtung (16) bewegbar an eine Rahmeneinrichtung (14) ankoppelbar oder angekoppelt ist; wobei die Federeinrichtung (16; 216; 316; 416; 516) mindestens einen Steg (18-i; 218-i; 318-i; 518-1) aufweist, welcher sich von dem mindestens einen Anbindungspunkt (24-i; 124) ausgehend erstreckt; und wobei der mindestens eine Steg (18-i; 218-i; 318-i; 518-1) derart strukturiert ist, dass er mindestens einen ersten Abschnitt (20-i; 220-i) sowie mindestens einen Verbreiterungsabschnitt (22-i; 222-i; 522) zum Verringern einer Nichtlinearität der Federeinrichtung (16) aufweist, welcher gegenüber dem ersten Abschnitt (20-i; 220-i) verbreitert ist.
(EN)
The invention relates to a micromechanical device and to a corresponding production method. The device is formed with a micromechanical device (10) comprising a spring device (16; 216; 316; 416; 516) which is coupled or can be movably coupled to a frame device (14) at at least one attachment point (24-i; 124) of the spring device (16); wherein the spring device (16; 216; 316; 416; 516) has at least one web (18-i; 218-i; 318-i; 518-1) which extends from the at least one attachment point (24-i; 124), and the at least one web (18-i; 218-i; 318-i; 518-1) is structured so as to have at least one first section (20-i; 220-i) and at least one widened section (22-i; 222-i; 522) for reducing a nonlinearity of the spring device (16), said widened section being widened compared to the first section (20-i; 220-i).
(FR)
L'invention concerne un dispositif micromécanique ainsi qu'un procédé de fabrication correspondant. Le dispositif micromécanique (10) comprend : un dispositif ressort (16; 216; 316; 416; 516), lequel est accouplé ou peut être accouplé de manière mobile en au moins un point de liaison (24-i; 124) du dispositif ressort (16) à un dispositif cadre (14) ; le dispositif ressort (16; 216; 316; 416; 516) comprenant au moins un élément de liaison (18-i; 218-i; 318-i; 518-1), lequel s'étend à partir de l'au moins un point de liaison (24-i; 124) ; et l'au moins un élément de liaison (18-i; 218-i; 318-i; 518-1) étant structuré de telle sorte qu'il comprend au moins une première partie (20-i; 220-i) ainsi qu'au moins une partie d'élargissement (22-i; 222-i; 522) pour réduire une non-linéarité du dispositif ressort (16), laquelle partie d'élargissement est élargie par rapport à la première partie (20-i; 220-i).
Latest bibliographic data on file with the International Bureau