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1. (WO2016182306) SYMMETRICAL Z-AXIS MEMS GYROSCOPE
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2016/182306    International Application No.:    PCT/KR2016/004861
Publication Date: 17.11.2016 International Filing Date: 10.05.2016
IPC:
G01C 19/5712 (2012.01), G01C 19/574 (2012.01), B81B 7/02 (2006.01)
Applicants: SHIN SUNG C&T CO., LTD. [KR/KR]; #708, 96, Gamasan-ro Geumcheon-gu Seoul 08501 (KR)
Inventors: SONG, Ci Moo; (KR).
YOUN, Keun Jung; (KR).
KANG, Jeong Sik; (KR).
KIM, Yong Kook; (KR).
HAN, Seung Ho; (KR).
SONG, Hyun Ju; (KR)
Agent: KASAN IP & LAW FIRM; 7th Floor, Hanwon Building 2423 Nambusunhwan-ro Seocho-gu Seoul 06719 (KR)
Priority Data:
10-2015-0066097 12.05.2015 KR
Title (EN) SYMMETRICAL Z-AXIS MEMS GYROSCOPE
(FR) GYROSCOPE MEMS D'AXE Z SYMÉTRIQUE
(KO) 대칭형 Z축 멤스 자이로스코프
Abstract: front page image
(EN)A novel symmetrical Z-axis MEMS gyroscope is provided. The MEMS gyroscope comprises: a sensor frame arranged parallel to a bottom wafer substrate; a sensor mass body moving relative to the sensor frame and excited at one degree of freedom in an excitation mode; and at least one sensing electrode for sensing the displacement of the sensor mass body at one degree of freedom in a sensing mode by Coriolis force when an external angular velocity is inputted into the sensor mass body, wherein the sensor mass body comprises two mass units, the two mass units are arranged in an axisymmetric form to each other, and the antiphase movements of the two mass units are maintained by an antiphase link device directly or indirectly connected between the two mass units.
(FR)L'invention concerne un nouveau gyroscope MEMS d'axe Z symétrique. Le gyroscope MEMS comprend : un cadre de capteur disposé parallèlement à un substrat de plaquette inférieure; un corps de masse de capteur se déplaçant par rapport au cadre de capteur et excité à un degré de liberté en mode excitation; et au moins une électrode de détection permettant de détecter le déplacement du corps de masse de capteur à un degré de liberté en mode détection par la force de Coriolis, lorsqu'une vitesse angulaire externe est entrée dans le corps de masse de capteur, le corps de masse de capteur comprenant deux unités de masse, les deux unités de masse étant disposées selon une forme axisymétrique l'une par rapport à l'autre, et les mouvements antiphase des deux unités étant maintenus par un dispositif de liaison antiphase directement ou indirectement connecté entre les deux unités de masse.
(KO)새로운 대칭형 z축 멤스 자이로스코프가 제공된다. 이러한 멤스 자이로스코프는, 바닥 웨이퍼기판에 대해 평행하게 배치되는 센서 프레임; 상기 센서 프레임에 대해 상대적인 움직임을 가지며, 가진모드에서 1자유도로 가진되는 센서 질량체; 및 상기 센서 질량체에 외부의 각속도가 입력될 때 코리올리 힘에 의해, 감지모드에서 1자유도로 상기 센서 질량체의 변위를 감지하는 적어도 1개의 감지 전극을 포함하되, 상기 센서 질량체는 2개의 질량체 유닛으로 이루어지고, 상기 2개의 질량체 유닛은 서로간에 선대칭 형태로 배치되며, 상기 2개의 질량체 유닛 사이에 직접적 또는 간접적으로 연결된 역위상 링크 기구에 의해 상기 2개의 질량체 유닛의 역위상 움직임이 유지된다.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: Korean (KO)
Filing Language: Korean (KO)