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Pub. No.:    WO/2016/181689    International Application No.:    PCT/JP2016/056376
Publication Date: 17.11.2016 International Filing Date: 02.03.2016
G03F 1/64 (2012.01)
Applicants: NIPPON LIGHT METAL COMPANY, LTD. [JP/JP]; 2-20, Higashi-shinagawa 2-chome, Shinagawa-ku, Tokyo 1408628 (JP)
Inventors: IIZUKA Akira; (JP).
NAKANO Koichi; (JP).
KIYOMI Hayato; (JP).
ODA Kazuhiro; (JP).
ISOBE Tomohiro; (JP)
Agent: ISONO INTERNATIONAL PATENT OFFICE, P.C.; Hulic Toranomon Building, 1-18, Toranomon 1-chome, Minato-ku, Tokyo 1050001 (JP)
Priority Data:
2015-095445 08.05.2015 JP
(JA) ペリクル用支持枠
Abstract: front page image
(EN)A support frame (1) for a pellicle having an aluminum alloy frame body (10), the obverse surface of the frame body (10) having a pellicle film (2) bonded thereto, and the reverse surface of the frame body (10) having a transparent substrate (M) bonded thereto, wherein the Young's modulus of the material constituting the frame body (10) is greater than the Young's modulus of the material constituting the transparent substrate (M). This configuration makes it possible to minimize deformation of the transparent substrate (M).
(FR)La présente invention concerne un cadre de support (1) pour une pellicule ayant un corps de cadre en alliage d'aluminium (10), la surface avers du corps de cadre (10) ayant un film de pellicule (2) lié à celle-ci, et la surface arrière du corps de cadre (10) ayant un substrat transparent (M) lié à celle-ci, le module de Young du matériau constituant le corps de cadre (10) étant supérieur au module de Young du matériau constituant le substrat transparent (M). Cette configuration permet de réduire au minimum la déformation du substrat transparent (M).
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)