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1. WO2016181511 - GAS LASER OSCILLATOR

Publication Number WO/2016/181511
Publication Date 17.11.2016
International Application No. PCT/JP2015/063678
International Filing Date 12.05.2015
IPC
H01S 3/036 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
02Constructional details
03of gas laser discharge tubes
036Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering or replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
H01S 3/03 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
02Constructional details
03of gas laser discharge tubes
H01S 3/097 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
09Processes or apparatus for excitation, e.g. pumping
097by gas discharge of a gas laser
CPC
H01S 3/03
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
02Constructional details
03of gas laser discharge tubes
H01S 3/036
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
02Constructional details
03of gas laser discharge tubes
036Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
H01S 3/097
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
09Processes or apparatus for excitation, e.g. pumping
097by gas discharge of a gas laser
Applicants
  • 三菱電機株式会社 MITSUBISHI ELECTRIC CORPORATION [JP]/[JP]
Inventors
  • 黒崎 芳晴 KUROSAKI, Yoshiharu
  • 海老原 成 EBIHARA, Sei
Agents
  • 高村 順 TAKAMURA, Jun
Priority Data
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) GAS LASER OSCILLATOR
(FR) OSCILLATEUR LASER À GAZ
(JA) ガスレーザ発振器
Abstract
(EN)
A gas laser oscillator 10 is provided with the following: a gas sealing means 11; a discharge excitation means 12; a partial reflecting mirror 13; a full reflecting mirror 14; a laser gas circulation means 15; ducts 26, 27; and a control device 29. The laser gas circulation means 15 has a heat exchanger 21, three blowing fans 22a, 22b, 22c for circulating the laser gas, and a guide 25, and creates a laser gas flow while cooling the laser gas passing there through. The gas laser oscillator 10 creates a flow inside the ducts 26, 27 that is directed toward a discharge excitation region R1, thereby causing an inflow of the laser gas, which has been cooled by means of non-excitation regions R2, R3, R4, and R5, and the acceleration of this flow stabilizes the laser output.
(FR)
La présente invention porte sur un oscillateur laser à gaz (10) qui comporte ce qui suit : un moyen d'étanchéité aux gaz (11) ; un moyen d'excitation de décharge (12) ; un miroir à réflexion partielle (13) ; un miroir à réflexion complète (14) ; un moyen de circulation de gaz laser (15) ; des conduits (26, 27) ; et un dispositif de commande (29). Le moyen de circulation de gaz laser (15) a un échangeur de chaleur (21), trois ventilateurs de soufflage (22a, 22b, 22c) destinés à faire circuler le gaz laser, et un guide (25), et crée un écoulement de gaz laser tout en refroidissant le gaz laser passant à travers ce dernier. L'oscillateur laser à gaz (10) crée un écoulement à l'intérieur des conduits (26, 27) qui est dirigé vers une région d'excitation de décharge (R1), ce qui provoque un afflux du gaz laser, qui a été refroidi au moyen de régions de non-excitation (R2, R3, R4, et R5), et l'accélération de cet écoulement stabilise la sortie de laser.
(JA)
ガスレーザ発振器10は、ガス封入手段11と、放電励起手段12と、部分反射鏡13と、全反射鏡14と、レーザガス循環手段15と、ダクト26,27と、制御装置29とを備える。レーザガス循環手段15は、熱交換器21と、レーザガスを循環させる3つの送風機22a,22b,22cと、ガイド25とを有し、通過するレーザガスを冷却しながらレーザガスの流れを形成する。ガスレーザ発振器10は、ダクト26、27内に、放電励起領域R1に向かう流れを形成することで、非励起領域R2,R3,R4,R5により冷却されたレーザガスを流入させ、この流れを速くすることでレーザ出力を安定させる。
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