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1. (WO2016180016) THIN FILM TRANSISTOR, ARRAY SUBSTRATE AND DISPLAY DEVICE HAVING THE SAME, AND METHOD OF MANUFACTURING THEREOF
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2016/180016    International Application No.:    PCT/CN2015/097050
Publication Date: 17.11.2016 International Filing Date: 10.12.2015
IPC:
H01L 21/34 (2006.01), H01L 29/786 (2006.01)
Applicants: BOE TECHNOLOGY GROUP CO., LTD. [CN/CN]; No.10 Jiuxianqiao Rd., Chaoyang District Beijing 100015 (CN)
Inventors: YAN, Liangchen; (CN)
Agent: TEE&HOWE INTELLECTUAL PROPERTY ATTORNEYS; CHEN, Yuan 10th Floor, Tower D, Minsheng Financial Center, 28 Jianguomennei Avenue Dongcheng District Beijing 100005 (CN)
Priority Data:
201510239500.5 12.05.2015 CN
Title (EN) THIN FILM TRANSISTOR, ARRAY SUBSTRATE AND DISPLAY DEVICE HAVING THE SAME, AND METHOD OF MANUFACTURING THEREOF
(FR) TRANSISTOR À FILM MINCE, SUBSTRAT DE RÉSEAU ET DISPOSITIF D'AFFICHAGE LE COMPRENANT, ET SON PROCÉDÉ DE FABRICATION
Abstract: front page image
(EN)The disclosure provides a method of manufacturing a thin film transistor on a base substrate by patterning an active layer comprising a metal oxynitride, and treating the active layer with a plasma comprising oxygen.
(FR)La présente invention concerne un procédé de fabrication d'un transistor à film mince sur un substrat de base par formation de motifs sur une couche active comprenant un oxynitrure métallique, et le traitement de la couche active avec un plasma comprenant de l'oxygène.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)