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1. WO2016166952 - SUBSTRATE CONVEYING ROBOT AND END EFFECTOR FOR SAME

Publication Number WO/2016/166952
Publication Date 20.10.2016
International Application No. PCT/JP2016/001920
International Filing Date 06.04.2016
IPC
H01L 21/677 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677for conveying, e.g. between different work stations
B25J 15/00 2006.1
BPERFORMING OPERATIONS; TRANSPORTING
25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; HANDLES FOR HAND IMPLEMENTS; WORKSHOP EQUIPMENT; MANIPULATORS
JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
15Gripping heads
B25J 15/06 2006.1
BPERFORMING OPERATIONS; TRANSPORTING
25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; HANDLES FOR HAND IMPLEMENTS; WORKSHOP EQUIPMENT; MANIPULATORS
JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
15Gripping heads
06with vacuum or magnetic holding means
B25J 15/08 2006.1
BPERFORMING OPERATIONS; TRANSPORTING
25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; HANDLES FOR HAND IMPLEMENTS; WORKSHOP EQUIPMENT; MANIPULATORS
JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
15Gripping heads
08having finger members
B65G 49/07 2006.1
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
49Conveying systems characterised by their application for specified purposes not otherwise provided for
05for fragile or damageable materials or articles
07for semiconductor wafers
CPC
B25J 15/0014
BPERFORMING OPERATIONS; TRANSPORTING
25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
15Gripping heads ; and other end effectors
0014having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
B25J 15/0033
BPERFORMING OPERATIONS; TRANSPORTING
25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
15Gripping heads ; and other end effectors
0033with gripping surfaces having special shapes
B25J 15/0052
BPERFORMING OPERATIONS; TRANSPORTING
25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
15Gripping heads ; and other end effectors
0052multiple gripper units or multiple end effectors
B25J 15/0061
BPERFORMING OPERATIONS; TRANSPORTING
25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
15Gripping heads ; and other end effectors
0052multiple gripper units or multiple end effectors
0061mounted on a modular gripping structure
B25J 15/0616
BPERFORMING OPERATIONS; TRANSPORTING
25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
15Gripping heads ; and other end effectors
06with vacuum or magnetic holding means
0616with vacuum
H01L 21/67742
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
67739into and out of processing chamber
67742Mechanical parts of transfer devices
Applicants
  • 川崎重工業株式会社 KAWASAKI JUKOGYO KABUSHIKI KAISHA [JP]/[JP]
Inventors
  • 後藤 博彦 GOTO, Hirohiko
  • 杉山 健二 SUGIYAMA, Kenji
Agents
  • 特許業務法人 有古特許事務所 PATENT CORPORATE BODY ARCO PATENT OFFICE
Priority Data
2015-08303015.04.2015JP
Publication Language Japanese (ja)
Filing Language Japanese (JA)
Designated States
Title
(EN) SUBSTRATE CONVEYING ROBOT AND END EFFECTOR FOR SAME
(FR) ROBOT DE TRANSPORT DE SUBSTRATS ET SON EFFECTEUR TERMINAL
(JA) 基板搬送ロボット及びそのエンドエフェクタ
Abstract
(EN) An end effector of a substrate conveying robot is provided with a plurality of blades, blade support parts for supporting the blades such that the inter-blade spacing along a substrate vertical direction varies, and a blade drive device for causing at least one of the plurality of blade support parts to move relatively along the substrate vertical direction with respect to another blade. Each of the blades has a first main surface oriented toward one end along the substrate vertical direction, a second main surface which is on the opposite side to the first main surface, a first substrate-holding mechanism for causing the first main surface to hold a substrate, and a second substrate-holding mechanism for causing the second main surface to hold a substrate.
(FR) L'invention concerne un effecteur terminal d'un robot de transport de substrats, qui est pourvu d'une pluralité de lames, de parties de support de lame pour maintenir les lames de manière que l'espacement entre lames le long d'une direction verticale de substrat varie, et d'un dispositif d'entraînement de lame pour amener au moins une partie de support de lame de la pluralité de parties de support de lame à se déplacer relativement le long de la direction verticale de substrat par rapport à une autre lame. Chacune des lames présente une première surface principale orientée vers une extrémité le long de la direction verticale de substrat, une seconde surface principale qui est du côté opposé à la première surface principale, un premier mécanisme de maintien de substrat pour amener la première surface principale à maintenir un substrat, et un second mécanisme de maintien de substrat pour amener la seconde surface principale à maintenir un substrat.
(JA)  基板搬送ロボットのエンドエフェクタが、複数のブレードと、ブレードどうしの基板垂線方向の間隔が可変となるように、ブレードを支持するブレード支持部と、複数のブレード支持部のうち少なくとも1つを他のブレードに対して基板垂線方向へ相対的に移動させるブレード駆動装置とを備える。ブレードの各々が、基板垂線方向の一方を向いた第1の主面と、その反対面である第2の主面と、第1の主面に基板を保持させる第1の基板保持機構と、第2の主面に基板を保持させる第2の基板保持機構とを有する。
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