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1. WO2016153346 - A ROTARY FEED-THROUGH FOR MOUNTING A ROTATING SUBSTRATE TUBE IN A LATHE, A CVD LATHE AND A CORRESPONDING METHOD USING THE CVD LATHE

Publication Number WO/2016/153346
Publication Date 29.09.2016
International Application No. PCT/NL2016/050198
International Filing Date 22.03.2016
IPC
C03B 37/018 2006.01
CCHEMISTRY; METALLURGY
03GLASS; MINERAL OR SLAG WOOL
BMANUFACTURE OR SHAPING OF GLASS, OR OF MINERAL OR SLAG WOOL; SUPPLEMENTARY PROCESSES IN THE MANUFACTURE OR SHAPING OF GLASS, OR OF MINERAL OR SLAG WOOL
37Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
01Manufacture of glass fibres or filaments
012Manufacture of preforms for drawing fibres or filaments
014made entirely or partially by chemical means
018by glass deposition on a glass substrate, e.g. by chemical vapour deposition
CPC
C03B 37/01807
CCHEMISTRY; METALLURGY
03GLASS; MINERAL OR SLAG WOOL
BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
37Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
01Manufacture of glass fibres or filaments
012Manufacture of preforms for drawing fibres or filaments
014made entirely or partially by chemical means ; , e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
018by glass deposition on a glass substrate, e.g. by ; inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
01807Reactant delivery systems, e.g. reactant deposition burners
C03B 37/01823
CCHEMISTRY; METALLURGY
03GLASS; MINERAL OR SLAG WOOL
BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
37Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
01Manufacture of glass fibres or filaments
012Manufacture of preforms for drawing fibres or filaments
014made entirely or partially by chemical means ; , e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
018by glass deposition on a glass substrate, e.g. by ; inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
01807Reactant delivery systems, e.g. reactant deposition burners
01815Reactant deposition burners or deposition heating means
01823Plasma deposition burners or heating means
C03B 37/0183
CCHEMISTRY; METALLURGY
03GLASS; MINERAL OR SLAG WOOL
BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
37Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
01Manufacture of glass fibres or filaments
012Manufacture of preforms for drawing fibres or filaments
014made entirely or partially by chemical means ; , e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
018by glass deposition on a glass substrate, e.g. by ; inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
01807Reactant delivery systems, e.g. reactant deposition burners
01815Reactant deposition burners or deposition heating means
01823Plasma deposition burners or heating means
0183for plasma within a tube substrate
C03B 37/01884
CCHEMISTRY; METALLURGY
03GLASS; MINERAL OR SLAG WOOL
BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
37Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
01Manufacture of glass fibres or filaments
012Manufacture of preforms for drawing fibres or filaments
014made entirely or partially by chemical means ; , e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
018by glass deposition on a glass substrate, e.g. by ; inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
01884Means for supporting, rotating and translating tubes or rods being formed, e.g. lathes
Applicants
  • DRAKA COMTEQ B.V. [NL]/[NL]
Inventors
  • MILICEVIC, Igor
  • HENS, Raoul
  • HARTSUIKER, Johannes Antoon
  • KRABSHUIS, Gertjan
  • VAN STRALEN, Mattheus Jacobus Nicolaas
Agents
  • ALGEMEEN OCTROOI- EN MERKENBUREAU B.V.
Priority Data
201451925.03.2015NL
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) A ROTARY FEED-THROUGH FOR MOUNTING A ROTATING SUBSTRATE TUBE IN A LATHE, A CVD LATHE AND A CORRESPONDING METHOD USING THE CVD LATHE
(FR) PASSAGE TOURNANT POUR LE MONTAGE D'UN SUBSTRAT TUBULAIRE EN ROTATION DANS UN TOUR, TOUR CVD ET PROCÉDÉ CORRESPONDANT L'UTILISANT
Abstract
(EN)
A rotary feed-through for mounting a rotating substrate tube in a lathe and providing a flow of process gas into the tube, said feed-through comprising a process gas supply line for providing a process gas into said substrate tube, a rotatable holder arranged for receiving and holding said substrate tube for rotating said substrate tube with respect to said process gas supply line, a rotary union provided between said rotatable holder and said process gas supply line for rotatably connecting said rotatable holder to said process gas supply line, a stationary housing connected to said process gas supply line and to said rotatable holder, therewith forming a closed cavity surrounding said rotary union, wherein said stationary housing further comprises an auxiliary gas supply line for providing said closed cavity with an auxiliary gas.
(FR)
Cette invention concerne un passage tournant pour le montage d'un substrat tubulaire en rotation dans un tour et l'injection d'un flux de gaz de procédé dans le tube, ledit passage rotatif comprenant un conduit d'alimentation en gaz de procédé pour injecter un gaz de procédé dans le tube, un porte-tube doué de rotation conçu pour recevoir et maintenir ledit substrat tubulaire en rotation par rapport audit conduit d'alimentation en gaz de procédé, un raccord rotatif situé entre ledit porte-tube et ledit conduit d'alimentation en gaz de procédé pour le raccordement rotatif dudit porte-tube doué de rotation audit conduit d'alimentation en gaz de procédé, un boîtier fixe raccordé audit conduit d'alimentation en gaz de procédé et audit porte-tube doué de rotation, pour former ainsi une cavité fermée entourant ledit raccord rotatif, ledit boîtier fixe comprenant en outre un conduit d'alimentation en gaz auxiliaire pour injecter un gaz auxiliaire dans ladite cavité fermée.
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