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1. WO2016152371 - SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE

International Application Status
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24.11.2020International Application Status ReportHTML, PDF, XMLPDF, XML
Published International Application
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29.09.2016Initial Publication with ISR( (A1 39/2016))PDF (32p.)PDF (32p.), ZIP(XML + TIFFs), FullText
Search and Examination-Related Documents
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26.09.2017(IB/373) International Preliminary Report on Patentability Chapter IPDF (5p.)PDF (5p.), ZIP(XML + TIFFs)
02.08.2017English Translation of the Written Opinion of the International Searching AuthorityPDF (6p.)PDF (6p.), ZIP(XML + TIFFs)
29.09.2016(ISA/237) Written Opinion of the International Searching AuthorityPDF (4p.)PDF (4p.), ZIP(XML + TIFFs)
29.09.2016Translation of the ISRPDF (2p.)PDF (2p.), ZIP(XML + TIFFs)
29.09.2016(ISA/210) International Search ReportPDF (4p.)PDF (4p.), ZIP(XML + TIFFs)
Related Documents on file at the International Bureau
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26.09.2017(IB/326) Notification of Transmittal of Copies of International Preliminary Report on Patentability Chapter IPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
26.09.2017(IB/373) English Translation of International Preliminary Report on Patentability Chapter IPDF (7p.)PDF (7p.), ZIP(XML + TIFFs)
18.07.2017(IB/308) Notice Informing the Applicant of the Communication of the International Application to the Designated OfficesPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
18.10.2016(IB/308) Notice Informing the Applicant of the Communication of the International Application to the Designated OfficesPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
29.09.2016Application Body as FiledPDF (27p.)PDF (27p.), ZIP(XML + TIFFs)
International application as filed
29.09.2016Priority DocumentPDF (19p.)PDF (19p.), ZIP(XML + TIFFs)
29.09.2016Priority DocumentPDF (23p.)PDF (23p.), ZIP(XML + TIFFs)
29.09.2016(RO/101) Request formPDF (4p.)
29.09.2016(IB/301) Notification of receipt of record copyPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
29.09.2016(IB/304) Notification Concerning Submission or Transmittal of Priority DocumentPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
29.09.2016(IB/311) Notification Concerning Availability of Publication of the International ApplicationPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)