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1. (WO2016149560) ANODE SHIELD
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2016/149560    International Application No.:    PCT/US2016/022979
Publication Date: 22.09.2016 International Filing Date: 17.03.2016
C23C 14/10 (2006.01), C23C 14/34 (2006.01), C23C 14/40 (2006.01), C23C 14/44 (2006.01), C23C 14/50 (2006.01)
Applicants: VISION EASE, LP [US/US]; 7000 Sunwood Drive NW Ramsey, Minnesota 55303 (US)
Inventors: MARSHALL, Michael; (US).
BROWN, Jeff; (US)
Agent: SWANSON, Shane S.; (US)
Priority Data:
62/135,057 18.03.2015 US
Abstract: front page image
(EN)A sputter system and an anode and anode shield assembly that provide for improved grounding for extended sputter cycles.
(FR)L'invention concerne un système de pulvérisation cathodique ainsi qu'une anode et un ensemble protection d'anode qui permettent une mise à la terre améliorée de cycles de pulvérisation cathodique étendus.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)