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1. WO2016146476 - TESTING HEAD WITH VERTICAL PROBES, PARTICULARLY FOR HIGH FREQUENCY APPLICATIONS

Publication Number WO/2016/146476
Publication Date 22.09.2016
International Application No. PCT/EP2016/055141
International Filing Date 10.03.2016
Chapter 2 Demand Filed 22.12.2016
IPC
G01R 1/073 2006.01
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
1Details of instruments or arrangements of the types covered by groups G01R5/-G01R13/122
02General constructional details
06Measuring leads; Measuring probes
067Measuring probes
073Multiple probes
G01R 1/067 2006.01
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
1Details of instruments or arrangements of the types covered by groups G01R5/-G01R13/122
02General constructional details
06Measuring leads; Measuring probes
067Measuring probes
CPC
G01R 1/06711
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
1Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
02General constructional details
06Measuring leads; Measuring probes
067Measuring probes
06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
G01R 1/06716
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
1Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
02General constructional details
06Measuring leads; Measuring probes
067Measuring probes
06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
06716Elastic
G01R 1/06733
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
1Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
02General constructional details
06Measuring leads; Measuring probes
067Measuring probes
06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
06733Geometry aspects
G01R 1/0675
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
1Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
02General constructional details
06Measuring leads; Measuring probes
067Measuring probes
06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
06733Geometry aspects
0675Needle-like
G01R 1/07314
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
1Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
02General constructional details
06Measuring leads; Measuring probes
067Measuring probes
073Multiple probes
07307with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
07314the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
G01R 1/07357
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
1Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
02General constructional details
06Measuring leads; Measuring probes
067Measuring probes
073Multiple probes
07307with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
07357with flexible bodies, e.g. buckling beams
Applicants
  • TECHNOPROBE S.P.A. [IT]/[IT]
Inventors
  • ACCONCIA, Daniele
Agents
  • FERRARI, Barbara
Priority Data
MI2015A00038613.03.2015IT
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) TESTING HEAD WITH VERTICAL PROBES, PARTICULARLY FOR HIGH FREQUENCY APPLICATIONS
(FR) TÊTE DE TEST AVEC DES SONDES VERTICALES, EN PARTICULIER POUR DES APPLICATIONS À HAUTE FRÉQUENCE
Abstract
(EN)
It is described a testing head (20) with vertical contact probes for the functionality testing of a device under test (26), the testing head comprising a plurality of vertical contact probes (21), each vertical contact probe (21) having a rod-like body (22) having a preset length extending between a first and a second end (24, 25), the second end being a contact tip (25) adapted to abut onto a contact pad (26A) of the device under test (26), the body (22) of each of the vertical contact probes (21) having a length less than 5000 μπι, and comprises at least one opening (28) extending all over its length and defining a plurality of arms (22a, 22b, 22c), parallel to each other, separated by the at least one opening (28) and connected to the end portions (24, 25) of the vertical contact probe (21), the testing head (20) also comprising at least one auxiliary guide (30), arranged along the body (22) in parallel to a plane defined by the device under test (26) and provided with suitable guide holes (30A) and one vertical contact probe (21) sliding through each of them, the auxiliary guide (30) being adapted to define a gap (31 A) including one end of the at least one opening (28) being a critical portion (28A) of the body (22) of the vertical contact probe (21), namely a zone more prone to breakings in the body (22), the critical portion (28 A) undergoing low or even no bending stresses in the gap (31A) with respect to the rest of the body (22).
(FR)
L'invention concerne une tête de test (20) avec des sondes de contact verticales pour le test de fonctionnalité d'un dispositif en cours de test (26), la tête de test comprenant une pluralité de sondes de contact verticales (21), chaque sonde de contact verticale (21) ayant un corps en forme de tige (22) avec une longueur prédéfinie s'étendant entre une première et une deuxième extrémité (24, 25), la deuxième extrémité étant une pointe de contact (25) conçue pour venir en butée contre un tampon de contact (26A) du dispositif en cours de test (26), le corps (22) de chacune des sondes de contact verticales (21) ayant une longueur inférieure à 5000 µm, et elle comprend au moins une ouverture (28) s'étendant sur toute sa longueur et définissant une pluralité de bras (22a, 22b, 22c), parallèles les uns aux autres, séparés par ladite ouverture (28) et reliés aux parties extrémités (24, 25) de la sonde de contact verticale (21), la tête de test (20) comprenant également au moins un guide auxiliaire (30), agencé le long du corps (22) parallèlement à un plan défini par le dispositif en cours de test (26) et pourvu de trous de guidage adaptés (30A) et une sonde de contact verticale (21) coulissant au travers de chacun d'eux, le guide auxiliaire (30) étant conçu pour définir un espace (31A) comprenant une extrémité de ladite ouverture (28) qui constitue une partie critique (28A) du corps (22) de la sonde de contact verticale (21), c'est-à-dire une zone dans le corps (22) ayant plus tendance à se casser, la partie critique (28A) subissant des contraintes de courbure faibles ou même nulles dans l'espace (31A) par rapport au reste du corps (22).
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