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1. WO2016142996 - SOLID-STATE LASER SYSTEM, AND LASER DEVICE FOR EXPOSURE DEVICE

Publication Number WO/2016/142996
Publication Date 15.09.2016
International Application No. PCT/JP2015/056654
International Filing Date 06.03.2015
IPC
H01S 3/10 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
G02F 1/37 2006.01
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
35Non-linear optics
37for second-harmonic generation
H01S 3/23 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
23Arrangement of two or more lasers not provided for in groups H01S3/02-H01S3/14113
CPC
G02F 1/37
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics
35Non-linear optics
37for second-harmonic generation
G02F 2001/354
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics
35Non-linear optics
353Frequency conversion, i.e. wherein a light beam with frequency components different from those of the incident light beams is generated
354Third or higher harmonic generation
G02F 2201/16
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
2201Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
16series; tandem
H01S 3/0078
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
005Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
0078Frequency filtering
H01S 3/0092
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
005Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
0092Nonlinear frequency conversion, e.g. second harmonic generation [SHG] or sum- or difference-frequency generation outside the laser cavity
H01S 3/06754
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
06Construction or shape of active medium
063Waveguide lasers, ; i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
067Fibre lasers
06754Fibre amplifiers
Applicants
  • ギガフォトン株式会社 GIGAPHOTON INC. [JP]/[JP]
Inventors
  • 小野瀬 貴士 ONOSE, Takashi
  • 若林 理 WAKABAYASHI, Osamu
Agents
  • 特許業務法人つばさ国際特許事務所 TSUBASA PATENT PROFESSIONAL CORPORATION
Priority Data
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) SOLID-STATE LASER SYSTEM, AND LASER DEVICE FOR EXPOSURE DEVICE
(FR) SYSTÈME LASER TRANSISTORISÉ, ET DISPOSITIF LASER POUR DISPOSITIF D'EXPOSITION
(JA) 固体レーザシステム、及び露光装置用レーザ装置
Abstract
(EN)
Disclosed is a solid-state laser system that may be provided with: a first solid-state laser device that outputs a first pulsed laser beam generated on the basis of a first seed beam, said pulsed laser beam having a first wavelength; a second solid-state laser device that outputs a second pulsed laser beam generated on the basis of a second seed beam, said second pulsed laser beam having a second wavelength; a wavelength conversion system, to which the first pulsed laser beam and the second pulsed laser beam are inputted, and which outputs a third pulsed laser beam having a third wavelength converted from the first wavelength and the second wavelength; a wavelength detection unit that detects the value of the third wavelength; and a wavelength control unit, which changes the first wavelength by controlling the first solid-state laser device in the cases where the absolute value of a difference between a target wavelength value and the third wavelength value detected by the wavelength detection unit is equal to or less than a predetermined value, and which changes the second wavelength by controlling the second solid-state laser device in the cases where the absolute value exceeds the predetermined value.
(FR)
L'invention concerne un système laser transistorisé qui peut être pourvu : d'un premier dispositif laser transistorisé qui émet un premier faisceau laser pulsé généré sur la base d'un premier faisceau source, ledit faisceau laser pulsé ayant une première longueur d'onde ; d'un deuxième dispositif laser transistorisé qui émet un deuxième faisceau laser pulsé généré sur la base d'un deuxième faisceau source, ledit deuxième faisceau laser pulsé ayant une deuxième longueur d'onde ; d'un système de conversion de longueur d'onde, auquel le premier faisceau laser pulsé et le deuxième faisceau laser pulsé sont appliqués en entrée, et qui émet un troisième faisceau laser pulsé ayant une troisième longueur d'onde obtenue par conversion à partir de la première longueur d'onde et de la deuxième longueur d'onde ; d'une unité de détection de longueur d'onde qui détecte la valeur de la troisième longueur d'onde ; et d'une unité de commande de longueur d'onde, qui change la première longueur d'onde par commande du premier dispositif laser transistorisé dans le cas où la valeur absolue d'une différence entre une valeur de longueur d'onde cible et la valeur de la troisième longueur d'onde détectée par l'unité de détection de longueur d'onde est inférieure ou égale à une valeur prédéterminée, et qui change la deuxième longueur d'onde par commande du deuxième dispositif laser transistorisé dans le cas où la valeur absolue dépasse la valeur prédéterminée.
(JA)
 本開示による固体レーザシステムは、第1のシード光に基づいて生成された第1の波長の第1のパルスレーザ光を出力する第1の固体レーザ装置と、第2のシード光に基づいて生成された第2の波長の第2のパルスレーザ光を出力する第2の固体レーザ装置と、第1のパルスレーザ光と第2のパルスレーザ光とが入射し、第1の波長と第2の波長とから波長変換された第3の波長の第3のパルスレーザ光を出力する波長変換システムと、第3の波長の値を検出する波長検出部と、目標波長の値と波長検出部により検出された第3の波長の値との差の絶対値が所定の値以下の場合は、第1の固体レーザ装置を制御して第1の波長を変化させ、所定の値を超えた場合は、第2の固体レーザ装置を制御して第2の波長を変化させる波長制御部とを備えてもよい。
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