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Machine translation
1. (WO2016104942) WAFER INSPECTION EQUIPMENT HAVING LASER CLEANING FUNCTION
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2016/104942    International Application No.:    PCT/KR2015/011968
Publication Date: 30.06.2016 International Filing Date: 09.11.2015
IPC:
H01L 21/66 (2006.01), H01L 21/268 (2006.01), H01L 21/677 (2006.01), H01L 21/02 (2006.01), H01L 21/67 (2006.01), H01L 21/683 (2006.01), H01L 21/687 (2006.01), G01R 1/073 (2006.01)
Applicants: IMT CO., LTD. [KR/KR]; 1dong 8th Floor(Woncheon-dong, Innoplex) 306, Sinwon-ro, Yeongtong-gu Suwon-si Gyeonggi-do 16675 (KR)
Inventors: LEE, Jong Myoung; (KR).
LEE, Kyu Pil; (KR).
JO, Seong Ho; (KR)
Agent: RYU, Chang Yeol; (KR)
Priority Data:
10-2014-0187450 23.12.2014 KR
10-2015-0132125 18.09.2015 KR
10-2015-0141924 12.10.2015 KR
Title (EN) WAFER INSPECTION EQUIPMENT HAVING LASER CLEANING FUNCTION
(FR) ÉQUIPEMENT D'INSPECTION DE GALETTE AYANT UNE FONCTION DE NETTOYAGE AU LASER
(KO) 레이저 세정 기능을 포함한 웨이퍼 검사 장비
Abstract: front page image
(EN)Disclosed is a wafer inspection equipment for inspecting a semiconductor wafer. The wafer inspection equipment comprises: a main body which defines a chamber on the inside thereof, a probe card being disposed at the top of the chamber; a chuck which fastens a wafer within the chamber; a moving unit which moves the chuck within the chamber and selectively brings the probe card into contact with the wafer; and a laser cleaning device which cleans the probe card within the chamber using a laser beam only if the probe card does not come into contact with the wafer.
(FR)L'invention concerne un équipement d'inspection de galette destiné à inspecter une galette en semiconducteur. L'équipement d'inspection de galette comprend : un corps principal qui définit une chambre à l'intérieur de celui-ci, une carte sonde étant disposée sur le dessus de la chambre ; un mandrin qui serre une galette à l'intérieur de la chambre ; une unité de déplacement qui déplace le mandrin à l'intérieur de la chambre et amène de manière sélective la carte sonde en contact avec la galette ; et un dispositif de nettoyage au laser qui nettoie la carte sonde à l'intérieur de la chambre en utilisant un faisceau laser uniquement si la carte sonde ne vient pas en contact avec la galette.
(KO)반도체 웨이퍼를 검사하기 위한 웨이퍼 검사 장비가 개시된다. 이 웨이퍼 검사 장비는 상부에 프로브카드가 배치된 챔버를 내측에 한정하는 본체; 상기 챔버 내에서 웨이퍼를 고정하는 척; 상기 척을 상기 챔버 내에서 이동시켜, 상기 프로브카드와 상기 웨이퍼를 선택적으로 접촉시키는 이동유닛; 및 상기 프로브카드와 상기 웨이퍼가 접촉하지 않을 때에만, 상기 챔버 내에서 레이저빔으로 상기 프로브카드를 세정하는 레이저 세정 장치를 포함한다.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: Korean (KO)
Filing Language: Korean (KO)