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Machine translation
1. (WO2016098966) 3D PATTERNING METHOD USING LASER
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2016/098966    International Application No.:    PCT/KR2015/005090
Publication Date: 23.06.2016 International Filing Date: 21.05.2015
IPC:
H01L 51/56 (2006.01), H01L 21/268 (2006.01), H01L 21/027 (2006.01)
Applicants: AP SYSTEMS INC. [KR/KR]; 15-5, Dongtansandan 8-gil, Dongtan-myeon Hwaseong-si Gyeonggi-do 445-810 (KR)
Inventors: PARK, Jong-kab; (KR).
KIM, Bo-Ram; (KR).
HUR, Jun-Gyu; (KR).
KIM, Doh-hoon; (KR)
Agent: LEE, Joon Sung; (KR)
Priority Data:
10-2014-0182140 17.12.2014 KR
Title (EN) 3D PATTERNING METHOD USING LASER
(FR) PROCÉDÉ DE FORMATION DE MOTIF 3D À L'AIDE D'UN LASER
(KO) 레이저를 이용한 3차원 패터닝 방법
Abstract: front page image
(EN)The present invention is for forming a pattern made of a 3D structure on a workpiece by using a laser. A method of 3D patterning of a workpiece using a laser comprises: a first step in which a unit processing area is set on a workpiece; a second step in which processing is performed for a 3D structure included in the unit processing area until a laser beam reaches another boundary of the unit processing area, having started at one boundary of the unit processing area and moved along a first scan path; a third step which switches the direction of the laser beam to the following step and moves the laser beam to a second scan path by a step pitch; and a fourth step in which processing for the entire unit processing area is performed when the movement of the laser beam along an nth scan path is completed by repeating the second step and the third step.
(FR)La présente invention est destinée à former un motif constitué d'une structure 3D sur une pièce à usiner à l'aide d'un laser. Un procédé de formation de motif 3D à l'aide d'un laser comprend : une première étape consistant à définir une zone de traitement unitaire sur une pièce à usiner ; une deuxième étape à laquelle un traitement est effectué pour une structure 3D comprise dans la zone de traitement unitaire jusqu'à ce qu'un faisceau laser, ayant démarré au niveau d'une frontière de la zone de traitement unitaire et s'étant déplacé le long d'un premier trajet de balayage, atteigne une autre frontière de la zone de traitement unitaire ; une troisième étape qui change le sens du faisceau laser vers l'échelon suivant et déplace le faisceau laser jusqu'à un deuxième trajet de balayage par un pas d'échelon ; et une quatrième étape à laquelle un traitement pour la totalité de la zone de traitement unitaire est effectué lorsque le mouvement du faisceau laser le long du n-ième trajet de balayage a été achevé par répétition de la deuxième étape et de la troisième étape.
(KO)본 발명은 레이저를 이용하여 피가공대상물에 3차원 구조물로 이루어진 패턴을 형성하기 위한 것으로서, 레이저를 이용하여 피가공대상물에 3차원 패터닝을 하는 방법에 있어서, 상기 피가공대상물 상에 단위 가공영역을 설정하는 제1단계와, 레이저 빔이 상기 단위 가공영역의 한 경계에서 시작하여, 1번째 스캔경로(scan path)를 따라 이동해가며, 상기 단위 가공영역의 다른 쪽 경계에 도달할 때까지, 상기 단위 가공영역 내에 포함되는 3차원 구조물에 대한 가공이 이루어지는 제2단계와, 상기 레이저 빔을 다음 스텝(step)으로 방향을 전환하고, 스텝피치(step pitch)만큼 이동시켜 2번째 스캔경로로 이동시키는 제3단계 및 상기 제2단계 및 제3단계를 반복수행하여 n번째 스캔경로를 따라 레이저 빔의 이동이 완료되면 단위 가공영역 전체에 대한 가공이 이루어지는 제4단계를 포함한다.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: Korean (KO)
Filing Language: Korean (KO)