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Machine translation
1. (WO2016098930) MULTIDIRECTIONAL WAFER TRANSFER SYSTEM
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2016/098930    International Application No.:    PCT/KR2014/012582
Publication Date: 23.06.2016 International Filing Date: 19.12.2014
IPC:
H01L 21/677 (2006.01)
Applicants: SUNNIX.CO.,LTD. [KR/KR]; (Ace Dongbaek Tower, Jung-dong) #1812, 16-4, Dongbaekjungang-ro 16beon-gil, Giheung-gu Yongin-si Gyeonggi-do 446-916 (KR)
Inventors: KIM, Jae Min; (KR).
LEE, Sang Shin; (KR).
PARK, Kyu Sung; (KR)
Agent: JEON, Jong Hag; (KR)
Priority Data:
10-2014-0184325 19.12.2014 KR
Title (EN) MULTIDIRECTIONAL WAFER TRANSFER SYSTEM
(FR) SYSTÈME DE TRANSFERT DE PLAQUETTES MULTIDIRECTIONNEL
(KO) 다방향 웨이퍼 이송 시스템
Abstract: front page image
(EN)Provided is a multidirectional wafer transfer system configured such that wafer transfer devices facing each other use the same one load port, thereby enabling the maximization of space availability for a place at which wafer transfer devices are installed and enabling the reduction of device installation costs. The multidirectional wafer transfer system comprises: at least one pair of wafer transfer devices disposed such that door parts thereof face each other; a load port provided only on a wafer transfer device disposed in any one row of the facing wafer transfer devices; and a wafer cassette configured so as to store wafers therein, wherein the load port comprises a support formed to protrude in the horizontal direction so as to support the wafer cassette, and the support is provided with an operating structure part for rotating and horizontally moving the wafer cassette.
(FR)L'invention concerne un système de transfert de plaquettes multidirectionnel, conçu de sorte que des dispositifs de transfert de plaquettes en face l'un de l'autre utilisent le même port de chargement, ce qui permet d'optimiser la disponibilité de l'espace d'un lieu dans lequel sont installés des dispositifs de transfert de plaquettes et permet de réduire les coûts d'installation du dispositif. Le système de transfert de plaquettes multidirectionnel comprend : au moins une paire de dispositifs de transfert de plaquettes disposés de sorte que leurs parties porte soient en face l'une de l'autre; un port de chargement disposé seulement sur un dispositif de transfert de plaquettes disposé dans l'une quelconque des rangées des dispositifs de transfert de plaquettes qui se font face; et une cassette de plaquettes, conçue de manière à stocker des plaquettes en son sein, le port de chargement comprenant un support formé pour faire saillie dans la direction horizontale de manière à supporter la cassette de plaquettes et une partie structure de fonctionnement destinée à faire tourner et déplacer horizontalement la cassette de plaquettes est prévue sur le support.
(KO)마주 보는 웨이퍼 이송 장치가 하나의 로드 포트를 공용으로 이용하도록 구성함으로써, 웨이퍼 이송 장치가 설치되는 장소에 대한 공간 활용도를 극대화할 수 있고, 장치 설치 비용도 절감할 수 있는 다방향 웨이퍼 이송 시스템이 소개된다. 이러한 다방향 웨이퍼 이송 시스템은 도어부가 마주 보도록 배치되는 적어도 한 쌍의 웨이퍼 이송 장치와, 상기 마주보는 웨이퍼 이송 장치 중 어느 한쪽 열에 배치된 웨이퍼 이송 장치에만 설치되는 로드 포트와, 그 내부에 웨이퍼를 보관하도록 구성되는 웨이퍼 카세트를 포함하며, 상기 로드 포트는 상기 웨이퍼 카세트를 지지할 수 있도록 수평 방향으로 돌출되어 형성되는 지지대를 구비하며, 이 지지대에는 상기 웨이퍼 카세트를 회전 및 수평 이동시키는 작동 구조부가 설치되는 것을 특징으로 한다.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: Korean (KO)
Filing Language: Korean (KO)