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1. (WO2016093098) DROPLET JET FORMATION DEVICE AND DROPLET JET FORMATION METHOD

Pub. No.:    WO/2016/093098    International Application No.:    PCT/JP2015/083618
Publication Date: Jun 16, 2016 International Filing Date: Nov 30, 2015
IPC: H01L 21/304
B08B 3/02
Applicants: AQUA SCIENCE CORPORATION
アクアサイエンス株式会社
Inventors: MORIHIRA, Kyota
森平 恭太
SEKI, Akiko
関 映子
Title: DROPLET JET FORMATION DEVICE AND DROPLET JET FORMATION METHOD
Abstract:
[Problem] To provide a device and a method which yield finer droplets than before and thereby have a high cleaning ability without damaging an object to be cleaned. [Solution] The device has been configured so that a stream of water vapor is mixed with a stream of a gas inside or outside a channel to thereby condense the water vapor to form a droplet jet.