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1. (WO2016091314) ELECTROSTATIC BIPRISM
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2016/091314 International Application No.: PCT/EP2014/077393
Publication Date: 16.06.2016 International Filing Date: 11.12.2014
Chapter 2 Demand Filed: 04.10.2016
IPC:
H01J 37/04 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02
Details
04
Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
Applicants:
FORSCHUNGSZENTRUM JÜLICH GMBH [DE/DE]; Leo-Brandt-Straße 52425 Jülich, DE
COMMISSARIAT À L'ÈNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES [FR/FR]; 17, rue des Martyrs F-38054 Grenoble cedex 9, FR
Inventors:
DUCHAMP, Martial; DE
DUNIN-BORKOWSKI, Rafal Edward; DE
GIRARD, Olivier; FR
COOPER, David; FR
Agent:
JOSTARNDT PATENTANWALTS-AG; Philipsstraße 8 52068 Aachen, DE
Priority Data:
Title (EN) ELECTROSTATIC BIPRISM
(FR) BIPRISME ÉLECTROSTATIQUE
Abstract:
(EN) The invention relates to an electrostatic biprism comprising a multilayer with a freestanding electrode, being preferably a multi-biprism, the method for preparing said electrostatic biprism and the use of said biprism within an electron beam device. The invention further relates to a microscope, an interferometer or an electron beam device comprising said electrostatic biprism.
(FR) La présente invention concerne un biprisme électrostatique comportant une multicouche avec une électrode autoportante, étant de préférence un double multi-prisme, le procédé pour la préparation dudit biprisme électrostatique et l'utilisation dudit biprisme à l'intérieur d'un dispositif à faisceau d'électrons. L'invention concerne en outre un microscope, un interféromètre ou un dispositif à faisceau d'électrons comprenant ledit biprisme électrostatique.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)