WIPO logo
Mobile | Deutsch | Español | Français | 日本語 | 한국어 | Português | Русский | 中文 | العربية |
PATENTSCOPE

Search International and National Patent Collections
World Intellectual Property Organization
Search
 
Browse
 
Translate
 
Options
 
News
 
Login
 
Help
 
Machine translation
1. (WO2016089132) NOZZLE LIP CLEANER AND SLIT COATER USING SAME
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2016/089132    International Application No.:    PCT/KR2015/013149
Publication Date: 09.06.2016 International Filing Date: 03.12.2015
IPC:
H01L 21/302 (2006.01), H01L 21/02 (2006.01)
Applicants: DMS CO., LTD. [KR/KR]; 211, Teoneokgol-ro, Paltan-myeon Hwaseong-si Gyeonggi-do 18531 (KR)
Inventors: PARK, Ho Youn; (KR).
KIM, Sun Yong; (KR).
LEE, Chung Han; (KR).
KOO, Ja Hyun; (KR)
Agent: LEE, Jaemyung; (KR)
Priority Data:
10-2014-0172646 04.12.2014 KR
Title (EN) NOZZLE LIP CLEANER AND SLIT COATER USING SAME
(FR) DISPOSITIF DE NETTOYAGE DE LÈVRE DE BUSE ET DISPOSITIF DE REVÊTEMENT DE FENTE L'UTILISANT
(KO) 노즐립 클리너 및 이를 이용한 슬릿 코터
Abstract: front page image
(EN)The present invention provides a nozzle lip cleaner and a slit coater using the same, the nozzle lip cleaner comprising: a cleaner main body; a blade support unit that has a first blade support member coupled to the cleaner main body; a blade unit that has a first blade, the rear end of which is coupled to the first blade support member, and the front end of which is brought into contact with the surface of the nozzle lip in order to scrape liquid chemical off the surface of the nozzle lip after the liquid chemical is discharged; an angle adjustment unit that has a first angle adjustment member provided in the cleaner main body to adjust the relative position between the front end of the first blade and the surface of the nozzle lip while moving the first blade support member; and a support pin unit that has a first support pin member disposed between the first blade support member and the first blade to serve as the center of rotation of the first blade in a width direction such that the front end of the first blade is brought into contact with the surface of the nozzle lip in parallel when the first blade support member moves.
(FR)La présente invention concerne un dispositif de nettoyage de lèvre de buse et un dispositif de revêtement de fente l'utilisant, le dispositif de nettoyage de lèvre de buse comprenant : un corps principal de dispositif de nettoyage ; une unité de support de lame qui comporte un premier élément de support de lame accouplé au corps principal de dispositif de nettoyage ; une unité à lame qui comporte une première lame, dont l'extrémité arrière est accouplée au premier élément de support de lame, et dont l'extrémité avant est amenée en contact avec la surface de la lèvre de buse afin d'éliminer un produit chimique liquide de la surface de la lèvre de buse par raclage après que le produit chimique liquide a été débité ; une unité de réglage d'angle qui comporte un premier élément de réglage d'angle disposé dans le corps principal de dispositif de nettoyage pour régler la position relative entre l'extrémité avant de la première lame et la surface de la lèvre de buse tout en déplaçant le premier élément de support de lame ; et une unité de broche de support qui comporte un premier élément de broche de support disposé entre le premier élément de support de lame et la première lame pour servir de centre de rotation de la première lame dans la direction de la largeur, de manière que l'extrémité avant de la première lame soit amenée en contact avec la surface de la lèvre de buse en parallèle quand le premier élément de support de lame se déplace.
(KO)본 발명은 클리너 본체; 상기 클리너 본체에 결합되는 제1 블레이드 지지부재를 갖는 블레이드 지지유닛; 후단은 상기 제1 블레이드 지지부재에 결합되며, 선단은 약액을 토출한 이후의 노즐립의 표면에 묻어 있는 약액을 긁어내기 위하여 상기 노즐립의 표면에 접촉되는 제1 블레이드를 갖는 블레이드유닛; 상기 클리너 본체에 구비되어 상기 제1 블레이드 지지부재를 이동시키면서 상기 제1 블레이드의 선단과 상기 노즐립의 표면 사이의 상대위치를 조절하는 제1 각도조절부재를 갖는 각도조절유닛; 그리고, 상기 제1 블레이드 지지부재와 상기 제1 블레이드 사이에 배치되어 상기 제1 블레이드 지지부재의 이동시 상기 제1 블레이드의 선단이 상기 노즐립의 표면에 평행하게 접촉되도록 상기 제1 블레이드의 폭방향 회전중심이 되는 제1 서포트 핀부재를 갖는 서포트 핀유닛을 포함하는 노즐립 클리너 및 이를 이용한 슬릿 코터를 제공한다.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: Korean (KO)
Filing Language: Korean (KO)