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1. (WO2016089084) MULTIFUNCTIONAL SENSOR DEVICE AND PRODUCTION METHOD FOR SAME
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2016/089084    International Application No.:    PCT/KR2015/012989
Publication Date: 09.06.2016 International Filing Date: 01.12.2015
IPC:
G01D 21/02 (2006.01), G01H 17/00 (2006.01), G01L 19/00 (2006.01), H01L 27/04 (2006.01)
Applicants: LIM, Dae Young [KR/KR]; (KR)
Inventors: LIM, Dae Young; (KR)
Agent: LEE, Cheol Hee; (KR)
Priority Data:
10-2014-0169898 01.12.2014 KR
Title (EN) MULTIFUNCTIONAL SENSOR DEVICE AND PRODUCTION METHOD FOR SAME
(FR) DISPOSITIF DE CAPTEUR MULTIFONCTIONNEL ET SON PROCÉDÉ DE PRODUCTION
(KO) 다기능 센서 장치 및 그의 제조 방법
Abstract: front page image
(EN)The present invention discloses a multifunctional sensor device able to provide multiple functions, by putting two or more sensors on a single substrate by using batch semiconductor processing; and a production method for same. The multifunctional sensor device comprises: two or more sensors formed in regions of the single substrate that are partitioned in planar fashion, by means of batch semiconductor processing of the substrate; And the two or more sensors are characterized by being partitioned into two or more in accordance with function.
(FR)La présente invention concerne un dispositif de capteur multifonctionnel capable de remplir des fonctions multiples, par placement de deux capteurs ou plus sur un substrat unique par utilisation du traitement de semi-conducteur discontinu ; et un procédé de production de celui-ci. Le dispositif de capteur multifonctionnel comprend : deux capteurs ou plus formés dans des régions du substrat unique qui sont séparées de façon plane, au moyen du traitement de semi-conducteur discontinu du substrat ; et deux capteurs ou plus sont caractérisés en ce qu’ils sont séparés en deux ou plus suivant la fonction.
(KO)본 발명은 둘 이상의 센서를 동일 기판 상에 일괄(Batch) 반도체 공정를 이용하여 구현하여서 다기능을 제공할 수 있는 다기능 센서 장치 및 그의 제조 방법을 개시하며, 상기 다기능 센서 장치는 동일 기판에 대한 일괄(Batch) 반도체 공정에 의하여 상기 기판의 평면적으로 구분된 영역들에 형성되는 둘 이상의 센서들;을 포함하며, 상기 둘 이상의 센서들은 기능에 따라 둘 이상으로 구분됨을 특징으로 한다.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: Korean (KO)
Filing Language: Korean (KO)