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1. (WO2016065361) MEMS-BASED CALORIMETER, FABRICATION, AND USE THEREOF

Pub. No.:    WO/2016/065361    International Application No.:    PCT/US2015/057384
Publication Date: Fri Apr 29 01:59:59 CEST 2016 International Filing Date: Tue Oct 27 00:59:59 CET 2015
IPC: G01K 17/08
G01N 25/20
G01N 25/48
Applicants: THE TRUSTEES OF COLUMBIA UNIVERSITY IN THE CITY OF NEW YORK
Inventors: JIA, Yuan
ZHANG, Zhixing
LIN, Qiao
Title: MEMS-BASED CALORIMETER, FABRICATION, AND USE THEREOF
Abstract:
A MEMS -based calorimeter includes a reference channel, a sample channel, and a thermopile configured to measure a temperature differential between the reference channel and a sample channel. The reference channel and the sample channel each include a passive mixer such as a splitting-and-recombination micromixer. The passive mixer can be formed by a first set of channels in a first layer and a second set of channels in a second layer. Methods for fabricating the MEMS- based calorimeter and methods of using the calorimeter to measure thermodynamic properties of chemical reactions are also provided.