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1. (WO2016064677) MULTIPLE COIL SPRING MEMS RESONATOR FOR OSCILLATORS AND REAL-TIME CLOCK APPLICATIONS
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2016/064677 International Application No.: PCT/US2015/055988
Publication Date: 28.04.2016 International Filing Date: 16.10.2015
IPC:
H03H 9/02 (2006.01) ,H03H 9/24 (2006.01) ,G01P 15/08 (2006.01)
H ELECTRICITY
03
BASIC ELECTRONIC CIRCUITRY
H
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9
Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
02
Details
H ELECTRICITY
03
BASIC ELECTRONIC CIRCUITRY
H
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9
Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
24
Constructional features of resonators of material which is not piezo-electric, electrostrictive, or magnetostrictive
G PHYSICS
01
MEASURING; TESTING
P
MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK; INDICATING PRESENCE OR ABSENCE OF MOVEMENT;  INDICATING DIRECTION OF MOVEMENT 
15
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02
by making use of inertia forces
08
with conversion into electric or magnetic values
Applicants:
MICROCHIP TECHNOLOGY INCORPORATED [US/US]; 2355 West Chandler Blvd. Chandler, AZ 85224-6199, US
Inventors:
HSU, Wan-Thai; US
CLARK, John, Ryan; US
Agent:
COOK, Carmen, C.; US
Priority Data:
14/883,40014.10.2015US
62/067,20622.10.2014US
62/067,23022.10.2014US
Title (EN) MULTIPLE COIL SPRING MEMS RESONATOR FOR OSCILLATORS AND REAL-TIME CLOCK APPLICATIONS
(FR) RÉSONATEUR MEMS À RESSORTS HÉLICOÏDAUX MULTIPLES POUR OSCILLATEURS ET APPLICATIONS D'HORLOGE EN TEMPS RÉEL
Abstract:
(EN) A multiple coil spring MEMS resonator includes a center anchor and a resonator body (106) including two or more coil springs (102a, 102b) extending in a spiral pattern from the center anchor to an outer closed ring (104). Each pair of coil springs originates from opposing points on the center anchor and extends in the spiral pattern to opposing points on the outer ring. The number of coil springs, the length and the width of the coil springs and the weight of the outer ring are selected to realize a desired resonant frequency. The outer ring (104) comprises perpendicular transducers (108) and may comprise holes (130) to adjust the weight of the outer ring (104). A set of drive electrodes (110) and sense electrodes (112) are attached to the substrate.
(FR) L'invention concerne un résonateur MEMS à ressorts hélicoïdaux multiples comprenant un élément d'ancrage central et un corps de résonateur (106) incluant deux ressorts hélicoïdaux (102a, 102b) ou plus s'étendant dans un motif en spirale à partir de l'élément d'ancrage central vers une bague extérieure fermée (104). Chaque paire de ressorts hélicoïdaux provient de points opposés situés sur l'élément d'ancrage central et s'étend dans le motif en spirale vers des points opposés situés sur la bague extérieure. Le nombre de ressorts hélicoïdaux, la longueur et la largeur des ressorts hélicoïdaux et le poids de la bague extérieure sont choisis de manière à réaliser une fréquence de résonance souhaitée. La bague extérieure (104) comprend des transducteurs perpendiculaires (108) et peut comprendre des trous (130) pour ajuster le poids de la bague extérieure (104). Un ensemble d'électrodes d'entraînement (110) et d'électrodes de détection (112) sont fixées au substrat.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)