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1. (WO2016063407) SCANNING PROBE MICROSCOPE

Pub. No.:    WO/2016/063407    International Application No.:    PCT/JP2014/078310
Publication Date: Fri Apr 29 01:59:59 CEST 2016 International Filing Date: Sat Oct 25 01:59:59 CEST 2014
IPC: G01Q 90/00
Applicants: SHIMADZU CORPORATION
株式会社島津製作所
Inventors: IKEDA, Yuichiro
池田 雄一郎
Title: SCANNING PROBE MICROSCOPE
Abstract:
In order to provide a scanning probe microscope capable of eliminating influence of vibration noise and obtaining, accurately and with high resolution, surface information about a sample S, this scanning probe microscope 1 comprises: a body unit 10 having a cantilever 21 that has a probe 21a, a sensor 23 for detecting displacement of the cantilever 21, an XYZ drive mechanism 25 for moving the cantilever 21 or the sample S, and a vibration isolation mechanism 12; and a control unit 30 for controlling the XYZ drive mechanism 25 to acquire surface information about a measured area of the sample S. The scanning probe microscope 1 further comprises: a wireless stand 60 having a power feeding coil 63 and a stand-side transmission/reception portion 64; and a power supply signal cable 42 connecting the wireless stand 60 and the control unit 30. The body unit 10 has: a high voltage generating circuit 15 for driving the XYZ drive mechanism 25; a power receiving coil 13; and a body-unit-side transmission/reception portion 14 for communicating with the stand-side transmission/reception portion 64.