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|1. (WO2016063159) SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF, MODULE, AND ELECTRONIC DEVICE|
|Applicants:||SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
|Title:||SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF, MODULE, AND ELECTRONIC DEVICE|
A transistor with stable electrical characteristics or a transistor with normally-off electrical characteristics. The transistor is a semiconductor device including a conductor, a semiconductor, a first insulator, and a second insulator. The semiconductor is over the first insulator. The conductor is over the semiconductor. The second insulator is between the conductor and the semiconductor. The first insulator includes fluorine and hydrogen. The fluorine concentration of the first insulator is higher than the hydrogen concentration of the first insulator.