WIPO logo
Mobile | Deutsch | Español | Français | 日本語 | 한국어 | Português | Русский | 中文 | العربية |
PATENTSCOPE

Search International and National Patent Collections
World Intellectual Property Organization
Search
 
Browse
 
Translate
 
Options
 
News
 
Login
 
Help
 
Machine translation
1. (WO2016060712) CMP PAD CONSTRUCTION WITH COMPOSITE MATERIAL PROPERTIES USING ADDITIVE MANUFACTURING PROCESSES
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2016/060712    International Application No.:    PCT/US2015/027473
Publication Date: 21.04.2016 International Filing Date: 24.04.2015
IPC:
H01L 21/304 (2006.01)
Applicants: APPLIED MATERIALS, INC. [US/US]; 3050 Bowers Avenue Santa Clara, California 95054 (US)
Inventors: BAJAJ, Rajeev; (US).
KRISHNAN, Kasiraman; (US).
ORILALL, Mahendra C.; (US).
REDFIELD, Daniel; (US).
REDEKER, Fred C.; (US).
PATIBANDLA, Nag B.; (US).
MENK, Gregory E.; (US).
FUNG, Jason G.; (US).
PERRY, Russell Edward; (US).
DAVENPORT, Robert E.; (US)
Agent: PATTERSON, B. Todd; (US)
Priority Data:
62/065,193 17.10.2014 US
62/065,270 17.10.2014 US
Title (EN) CMP PAD CONSTRUCTION WITH COMPOSITE MATERIAL PROPERTIES USING ADDITIVE MANUFACTURING PROCESSES
(FR) CONSTRUCTION DE TAMPON CMP À PROPRIÉTÉS DE MATÉRIAU COMPOSITE AU MOYEN DE PROCESSUS DE FABRICATION ADDITIVE
Abstract: front page image
(EN)Embodiments of the disclosure generally provide polishing pads includes a composite pad body and methods for forming the polishing pads. One embodiment provides a polishing pad including a composite pad body. The composite pad body includes one or more first features formed from a first material or a first composition of materials, and one or more second features formed from a second material or a second composition of materials, wherein the one or more first features and the one or more second features are formed by depositing a plurality of layers comprising the first material or first composition of materials and second material or second composition of materials.
(FR)Selon des modes de réalisation, l'invention concerne, d'une manière générale, des tampons de polissage qui comprennent un corps de tampon composite, et des procédés de formation des tampons de polissage. Un mode de réalisation porte sur un tampon de polissage comprenant un corps de tampon composite. Le corps de tampon composite comprend un ou plusieurs premiers éléments formés à partir d'un premier matériau ou d'une première composition de matériaux, et un ou plusieurs seconds éléments formés à partir d'un second matériau ou d'une seconde composition de matériaux, le ou les premiers éléments et le ou les seconds éléments étant formés par dépôt d'une pluralité de couches comprenant le premier matériau ou première composition de matériaux et le second matériau ou seconde composition de matériaux.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)