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1. (WO2016060619) OPTICAL WAVEGUIDE STRUCTURE AND OPTICAL GAS SENSOR, AND METHODS OF FABRICATION THEREOF
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2016/060619    International Application No.:    PCT/SG2015/050394
Publication Date: 21.04.2016 International Filing Date: 16.10.2015
Chapter 2 Demand Filed:    26.07.2016    
IPC:
G02B 6/10 (2006.01), G02B 6/00 (2006.01), G01N 21/39 (2006.01), G01N 21/61 (2006.01)
Applicants: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH [SG/SG]; 1 Fusionopolis Way #20-10 Connexis Singapore 138632 (SG)
Inventors: TAO, Jifang; (SG).
CAI, Hong; (SG).
GU, Alex Yuandong; (SG).
CHANG, Hyun Kee; (SG)
Agent: VIERING, JENTSCHURA & PARTNER LLP; P.O. Box 1088 Rochor Post Office Rochor Road Singapore 911833 (SG)
Priority Data:
10201406681S 16.10.2014 SG
Title (EN) OPTICAL WAVEGUIDE STRUCTURE AND OPTICAL GAS SENSOR, AND METHODS OF FABRICATION THEREOF
(FR) STRUCTURE DE GUIDE D'ONDES OPTIQUE ET CAPTEUR DE GAZ OPTIQUE, ET LEURS PROCÉDÉS DE FABRICATION
Abstract: front page image
(EN)There is provided an optical waveguide structure, including a substrate, an insulating layer disposed on the substrate whereby the insulating layer includes an air slot formed therein, a first material layer suspended over the air slot whereby the first material layer constitutes a waveguide core of the optical waveguide structure, and a second material layer disposed over the waveguide core whereby the waveguide core is suspended over the air slot by the second material layer. There is also provided an optical gas sensor incorporating the optical waveguide structure and methods of fabrication thereof.
(FR)L'invention concerne une structure de guide d'ondes optique, comprenant un substrat, une couche isolante disposée sur le substrat, la couche isolante comprenant une fente d'air formée à l'intérieur de celle-ci, une première couche de matériau suspendue au-dessus de la fente d'air, la première couche de matériau constituant un noyau de guide d'ondes de la structure de guide d'ondes optique, et une seconde couche de matériau disposée sur le noyau de guide d'ondes, le noyau de guide d'ondes étant suspendu au-dessus de la fente d'air par la seconde couche de matériau. L'invention concerne également un capteur de gaz optique incorporant la structure de guide d'ondes optique, et leurs procédés de fabrication.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)