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1. (WO2016060205) ELECTROSTATIC CHUCK DEVICE

Pub. No.:    WO/2016/060205    International Application No.:    PCT/JP2015/079188
Publication Date: Fri Apr 22 01:59:59 CEST 2016 International Filing Date: Fri Oct 16 01:59:59 CEST 2015
IPC: H01L 21/683
Applicants: SUMITOMO OSAKA CEMENT CO., LTD.
住友大阪セメント株式会社
Inventors: ITO, Tomomi
伊藤 智海
MIURA, Yukio
三浦 幸夫
Title: ELECTROSTATIC CHUCK DEVICE
Abstract:
This electrostatic chuck device 80 is sequentially provided, in the following order, with: an electrostatic chuck part 2 that has one main surface serving as a stage surface on which a plate-like sample is placed, while containing an internal electrode for electrostatic suction inside; a first bonding layer 4; a sheet material 6; a second bonding layer 8; and a base part 10 for temperature regulation, which regulates the temperature of the electrostatic chuck part 2 to a desired temperature. The first bonding layer 4 comprises a joining layer 14 that has a thickness of 1-500 nm and a silicone adhesive layer 24 that has a thickness of 2-30 μm. The second bonding layer 8 comprises a joining layer 18 that has a thickness of 1-500 nm and a silicone adhesive layer 28 that has a thickness of 2-30 μm.