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1. (WO2016059928) METHOD OF MANUFACTURING MOLD FOR CURVED DIFFRACTION GRATING, METHOD OF MANUFACTURING CURVED DIFFRACTION GRATING, CURVED DIFFRACTION GRATING, AND OPTICAL DEVICE

Pub. No.:    WO/2016/059928    International Application No.:    PCT/JP2015/076211
Publication Date: Fri Apr 22 01:59:59 CEST 2016 International Filing Date: Thu Sep 17 01:59:59 CEST 2015
IPC: G02B 5/18
B29C 33/38
B29C 59/02
G01J 3/18
Applicants: HITACHI HIGH-TECHNOLOGIES CORPORATION
株式会社 日立ハイテクノロジーズ
Inventors: AONO Takanori
青野 宇紀
MATSUI Shigeru
松井 繁
EBATA Yoshisada
江畠 佳定
YAEGASHI Kenta
八重樫 健太
Title: METHOD OF MANUFACTURING MOLD FOR CURVED DIFFRACTION GRATING, METHOD OF MANUFACTURING CURVED DIFFRACTION GRATING, CURVED DIFFRACTION GRATING, AND OPTICAL DEVICE
Abstract:
To form a saw-like diffraction grating pattern on a curved surface substrate by machining, since a tool has a fixed angle, a shape in which the angles of the diffraction grating pattern at the central and outer circumferential sections of the curved surface are different from one another is formed. Also, to form, on a curved surface substrate, a diffraction grating pattern having a serrated shape through a semiconductor process such as photolithography and etching, the adjustment of the focal depth during the photolithography and the adjustment of the etching angle are required, thereby increasing costs. This method of manufacturing a mold for a curved diffraction grating includes: a step for forming a diffraction grating pattern 21 on a metallic planar diffraction grating substrate 20; a step for forming solder 22 on a surface opposite to the surface of the metallic planar diffraction grating substrate 20 on which the diffraction grating pattern is formed; a step for forming, on the curved surface substrate 23, a layer of a junction material 24 which is eutectically bonded to the solder 22,; and a step for sandwiching the metallic planar diffraction grating substrate 20 between the curved surface fixing substrate 23 and the curved surface fixing substrate 24 and applying a load.