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1. (WO2016059177) OPTICAL BEAM SCANNER

Pub. No.:    WO/2016/059177    International Application No.:    PCT/EP2015/073926
Publication Date: Fri Apr 22 01:59:59 CEST 2016 International Filing Date: Fri Oct 16 01:59:59 CEST 2015
IPC: G02B 6/42
G02B 26/10
Applicants: MEDLUMICS S.L.
Inventors: MARGALLO BALBÁS, Eduardo
RUBIO GIVERNAU, José Luis
ZINOVIEV, Kirill
Title: OPTICAL BEAM SCANNER
Abstract:
A scanning device is presented having a substrate with a first surface and an opposite, parallel second surface. A region of the substrate includes the first surface and the opposite parallel second surface, and is defined via an etching process through a thickness of the substrate, where the region remains attached to the substrate via one or more hinges. A waveguide is patterned over the first surface of the region and guides a beam of radiation along a length of the waveguide. The scanning device includes a facet located on the first surface of the region. The facet is designed to reflect at least a portion of the beam of radiation through the region. An optical element is located on the second surface of the region, and is designed to receive the reflected portion of the beam of radiation.