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1. (WO2016058851) ILLUMINATION OPTICAL UNIT FOR A PROJECTION EXPOSURE SYSTEM
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2016/058851    International Application No.:    PCT/EP2015/072863
Publication Date: 21.04.2016 International Filing Date: 02.10.2015
IPC:
G03F 7/20 (2006.01)
Applicants: CARL ZEISS SMT GMBH [DE/DE]; Rudolf-Eber-Strasse 2 73447 Oberkochen (DE)
Inventors: PATRA, Michael; (DE).
BIELING, Stig; (DE).
DEGÜNTHER, Markus; (DE).
MÜLLER, Ralf; (DE)
Agent: RAU, SCHNECK & HÜBNER PATENTANWÄLTE RECHTSANWÄLTE PARTGMBB; Königstrasse 2 90402 Nürnberg (DE)
Priority Data:
10 2014 221 175.1 17.10.2014 DE
Title (EN) ILLUMINATION OPTICAL UNIT FOR A PROJECTION EXPOSURE SYSTEM
(FR) UNITÉ OPTIQUE D'ÉCLAIRAGE POUR APPAREIL DE LITHOGRAPHIE PAR PROJECTION
Abstract: front page image
(EN)An illumination optical unit (17i) for a projection exposure system (1) comprises a plurality of radiation-reflecting components, wherein all of the radiation-reflecting components are arranged in such a way that a beam (10i) with illumination radiation (5) is deflected at these in the same sense.
(FR)Unité optique d'éclairage (17i) pour un système de lithographie par projection (1), qui comprend une pluralité de composants réfléchissant le rayonnement, tous les composants réfléchissant le rayonnement étant disposés de telle sorte qu'un faisceau (10i) d'un rayonnement d'éclairage (5) est dévié dans le même sens au niveau desdits composants.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)