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1. (WO2016058769) AN IMAGE SENSOR, SENSING METHOD AND LITHOGRAPHIC APPARATUS

Pub. No.:    WO/2016/058769    International Application No.:    PCT/EP2015/071155
Publication Date: Fri Apr 22 01:59:59 CEST 2016 International Filing Date: Thu Sep 17 01:59:59 CEST 2015
IPC: G03F 7/20
G01J 1/04
G01T 1/29
Applicants: ASML NETHERLANDS B.V.
Inventors: PANDEY, Nitesh
STAS, Roland, Johannes, Wilhelmus
Title: AN IMAGE SENSOR, SENSING METHOD AND LITHOGRAPHIC APPARATUS
Abstract:
An image sensor for sensing a region of an image projected via a lithographic patterning device, comprises a sensor mask array and an array of sensor elements, wherein the sensor mask array comprises an array of sensor masks, each sensor mask positioned over a respective at least one of the sensor elements, each of the sensor masks has a pattern of apertures, and the aperture pattern of at least one of the sensor masks is different to the aperture pattern of at least one other of the sensor masks.