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1. (WO2016056109) ANALYSIS DEVICE AND ANALYSIS METHOD

Pub. No.:    WO/2016/056109    International Application No.:    PCT/JP2014/077098
Publication Date: Fri Apr 15 01:59:59 CEST 2016 International Filing Date: Fri Oct 10 01:59:59 CEST 2014
IPC: H01L 21/66
G01N 25/72
G01R 31/26
Applicants: HAMAMATSU PHOTONICS K.K.
浜松ホトニクス株式会社
Inventors: NAKAMURA Tomonori
中村 共則
Title: ANALYSIS DEVICE AND ANALYSIS METHOD
Abstract:
Provided are a device and method with which a heat source position corresponding to a failure point can be specified. This analysis device, which specifies a heat source position in a semiconductor device, is provided with a tester that applies an AC signal to the semiconductor device, an infrared camera that detects light from the semiconductor device corresponding to the AC signal and outputs a detection signal, and a data analysis unit that specifies a heat source position on the basis of the detection signal.