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1. (WO2016055443) SPLITTING METHOD AND USE OF A MATERIAL IN A SPLITTING METHOD

Pub. No.:    WO/2016/055443    International Application No.:    PCT/EP2015/072990
Publication Date: Fri Apr 15 01:59:59 CEST 2016 International Filing Date: Wed Oct 07 01:59:59 CEST 2015
IPC: H01L 21/304
H01L 21/02
H01L 31/18
Applicants: SILTECTRA GMBH
Inventors: DRESCHER, Wolfram
RICHTER, Jan
BEYER, Christian
Title: SPLITTING METHOD AND USE OF A MATERIAL IN A SPLITTING METHOD
Abstract:
The invention relates to a splitting method for splitting a solid feedstock into at least two solid sectional pieces, and the use of a material in such a splitting method. In order to increase the total yield of a splitting method, the use of a polymer hybrid material containing one or more fillers in a polymer matrix material is proposed. A corresponding splitting method comprises the steps of providing the solid feedstock having at least one exposed surface, applying a polymer hybrid material containing fillers in a polymer matrix onto at least one exposed surface of the solid feedstock so that a composite structure results, and applying a voltage field on the composite structure, such that the solid feedstock is cleft into at least two solid sectional pieces along a plane within the solid feedstock.