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1. (WO2016053719) DECONVOLUTION TO REDUCE THE EFFECTIVE SPOT SIZE OF A SPECTROSCOPIC OPTICAL METROLOGY DEVICE
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2016/053719 International Application No.: PCT/US2015/051774
Publication Date: 07.04.2016 International Filing Date: 23.09.2015
IPC:
G01N 21/88 (2006.01) ,G01N 21/956 (2006.01)
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
84
Systems specially adapted for particular applications
88
Investigating the presence of flaws, defects or contamination
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
84
Systems specially adapted for particular applications
88
Investigating the presence of flaws, defects or contamination
95
characterised by the material or shape of the object to be examined
956
Inspecting patterns on the surface of objects
Applicants:
NANOMETRICS INCORPORATED [US/US]; 1550 Buckeye Drive Milpitas, California 95035, US
Inventors:
SHACHAF, Amit; US
VAGOS, Pedro; FR
ELAD, Michael; IL
Agent:
HALBERT, Michael J.; US
Priority Data:
14/505,37302.10.2014US
62/058,51201.10.2014US
Title (EN) DECONVOLUTION TO REDUCE THE EFFECTIVE SPOT SIZE OF A SPECTROSCOPIC OPTICAL METROLOGY DEVICE
(FR) DÉCONVOLUTION PERMETTANT DE RÉDUIRE LA TAILLE DU POINT EFFICACE D'UN DISPOSITIF DE MÉTROLOGIE OPTIQUE SPECTROSCOPIQUE
Abstract:
(EN) The effective spot size of a spectroscopic metrology device is reduced through deconvolution of a measurement spectra set acquired from a measurement target combined with a training spectra set obtained from a training target. The measurement spectra set may be obtained using sparse sampling of a grid scan of a measurement target. The training spectra set is obtained from a grid scan of a training target that is similar to the measurement target. The training spectra set and the measurement spectra set include spectra from different grid nodes. Deconvolution of the measurement spectra and the training spectra sets produces an estimated spectrum for the measurement target that is an estimate of a spectrum from the measurement target produced with incident light having an effective spot size that is smaller than the actual spot size. One or more characteristics of the measurement target may then be determined using the estimated spectrum.
(FR) La taille de point efficace d'un dispositif de métrologie spectroscopique est réduite par une déconvolution d'un ensemble de spectres de mesure acquis à partir d'une cible de mesure et combiné à un ensemble de spectres d'entraînement obtenu à partir d'une cible d'entraînement. L'ensemble de spectres de mesure peut être obtenu par un échantillonnage clairsemé de balayage de grille d'une cible de mesure. L'ensemble de spectres d'entraînement est obtenu à partir d'un balayage de grille d'une cible d'entraînement qui est similaire à la cible de mesure. L'ensemble de spectres d'entraînement et l'ensemble de spectres de mesure comprennent des spectres provenant de différents nœuds de grille. La déconvolution des ensembles de spectres de mesure et de spectres d'entraînement produit un spectre estimé de la cible de mesure, qui consiste en une estimation d'un spectre issu de la cible de mesure produit par une lumière incidente ayant une taille de point efficace qui est plus petite que la taille de point réelle. Une ou plusieurs caractéristiques de la cible de mesure peuvent ensuite être déterminées en utilisant le spectre estimé.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)