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1. (WO2016052248) SHAPE MEASURING DEVICE

Pub. No.:    WO/2016/052248    International Application No.:    PCT/JP2015/076612
Publication Date: Fri Apr 08 01:59:59 CEST 2016 International Filing Date: Sat Sep 19 01:59:59 CEST 2015
IPC: G01B 21/00
G01B 21/20
Applicants: NIPPON ELECTRIC GLASS CO., LTD.
日本電気硝子株式会社
Inventors: TAKAHASHI Tadashi
高橋 忠
Title: SHAPE MEASURING DEVICE
Abstract:
A shape measuring device (1) that measures the surface shape of a board-like body (G) is provided with: a plurality of fluid-floating sections (2), which jet a fluid to the board-like body (G), and support the board-like body (G) in a state wherein the board-like body is floated in horizontal attitude; and a measuring section (3) that measures surface shape data that indicates the surface shape of the board-like body (G) in the floating state. The fluid-floating sections (2) are disposed by being separated from each other.